Aluminum foil mesh for transmission microscope and scanning microscope and its production method

Abstract

The invention provides an aluminum foil mesh for a transmission microscope and a scanning microscope. The thickness of the aluminum foil mesh is from 0.01 mm to 0.05 mm and the number of mesh holes is from 1 mesh to 600 meshes. A production method of the aluminum foil mesh comprises drawing, aluminum foil processing, performing photoresist, pre-baking, performing exposure, developing, rinsing, post-baking, etching and removing of photoresist. The production method of the aluminum foil mesh for the transmission microscope and the scanning microscope has the advantage of enabling obtained mesh holes of electron microscope aluminum foil meshes to be clear and hole walls of the electron microscope aluminum foil meshes to be smooth.

Description

technical field

[0001] The invention relates to an aluminum foil net used for a transmission microscope and a scanning microscope and a manufacturing method thereof. Background technique

[0002] After 1975, in the field of electron microscopy in China, metal grids were developed, such as copper grids, nickel grids, stainless steel grids, molybdenum grids, and tungsten grids; aluminum grids were successfully developed for the development and special needs of materials science research. . The main function of the aluminum mesh is not to interact with other metal elements in the experimental analysis and research.

[0003] At present, the Chinese patent application (publication number: CN101866803A) discloses a transmission electron microscope microgrid, which is the closest prior art, and it specifically discloses that the microgrid 10 includes a carrier 110, a carbon nanotube support 120 and a fixed body The material of the carrier 110 (that is, the aluminum foil mesh) can...

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