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Film formation apparatus, film formation method, and mask unit to be used for them
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A technology for masks and components, applied in the field of film forming devices, can solve the problems of inability to obtain mask accuracy and the like, and achieve the effect of high yield
Inactive Publication Date: 2013-06-05
CANON KK
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Problems solved by technology
Therefore, as the number of unit masks becomes larger, it has become a problem that the necessary mask accuracy cannot be obtained more often when viewed from the overall substrate
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example 1）
[0054] (1) Substrate
[0055]First, in a glass substrate having a size of 1 / 4 of the size of the fourth-generation glass substrate, a circuit including TFTs was formed, thereby manufacturing a TFT substrate (substrate 1 ). Note that in the manufactured circuit substrate, display areas of 3.5-inch panels of 326ppi are arranged in 4 rows in the vertical direction and 6 columns in the horizontal direction to obtain 24 display areas in total, and each of the display areas is provided with A collection of circuits used to drive a display area.
[0056] (2) Steps of forming an organic EL element
[0057] Next, on the thus prepared TFT substrate (substrate 1 ), organic EL elements of three colors of red, green and blue (RGB) were formed by the method described below.
[0058] First, a hole transport layer (HTL), which is a layer common to all organic EL elements, is formed using a vapor deposition mask having openings each having a size corresponding to one display area.
[0059] ...
example 2）
[0066] (1) Substrate
[0067] First, in a glass substrate having a size of 1 / 4 of the size of the fourth-generation glass substrate, a circuit including TFTs was formed, thereby manufacturing a TFT substrate (substrate 1 ). Note that in the manufactured TFT substrate, display areas of 3.5-inch panels of 326ppi are arranged in 5 rows in the vertical direction and 6 columns in the horizontal direction to obtain 30 display areas in total, and each of the display areas is provided with A collection of circuits used to drive a display area.
[0068] (2) Steps of forming an organic EL element
[0069] Next, on the thus prepared TFT substrate (substrate 1 ), organic EL elements of three colors of red, green and blue (RGB) were formed by the method described below.
[0070] First, a hole transport layer (HTL), which is a layer common to all organic EL elements, is formed using a vapor deposition mask having openings each having a size corresponding to one display area.
[0071] Nex...
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Abstract
Provided is a film formation apparatus for manufacturing an apparatus such as an organic electroluminescence light emitting apparatus, which has high resolution and high productivity. The film formation apparatus includes: multiple mask unit holding portions for supporting mask units, respectively; multiple alignment mechanisms provided in accordance with the multiple mask unit holding portions; and a vapor deposition source in which the multiple mask units are aligned and arranged by the multiple alignment mechanisms one by one with respect to one substrate, and then film formation is performed.
Description
technical field [0001] The present invention relates to a film forming apparatus, a film forming method using the film forming apparatus, and a mask unit to be used in the film forming apparatus and the film forming method. Background technique [0002] Flat-type display devices (organic EL displays) formed by arranging a plurality of organic electroluminescence (EL) light-emitting elements, each of which is selectively controlled to emit light of a predetermined wavelength, are now attracting attention. [0003] Organic EL displays are generally formed by using a vacuum thin film forming technique. Note that when an organic EL display is manufactured, it is necessary to arrange a plurality of organic EL light-emitting elements in a matrix in the vertical and horizontal directions on a substrate such as transparent glass. Therefore, when an organic EL display is manufactured, it is necessary to perform fine patterning when forming an organic EL element having a specific emi...
Claims
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