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Air-cooled plasma protecting gas hood nozzle

A plasma and protective gas cover technology, applied in the field of plasma processing equipment, can solve problems such as insufficient reaction, impact, and thermal stress on workpieces, and achieve the effects of ensuring an active atmosphere, reducing costs, and reducing thermal impact

Active Publication Date: 2015-03-04
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide an air-cooled plasma protective gas hood nozzle, which is to solve the impact of the surrounding environment on the processing during the atmospheric plasma processing, the insufficient reaction, and the thermal stress of the workpiece caused by the high processing temperature. question

Method used

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Experimental program
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specific Embodiment approach 1

[0018] Specific implementation mode one: combine figure 1 , figure 2 As shown, it consists of a fixed plate 1, a circular tube-shaped protective cover 2, and a circular tube-shaped torch tube extension 3:

[0019] The inner hole of the tubular protective cover 2 is conical, and there are three ventilation holes 2-1 distributed at intervals of 120 degrees on the inner wall to ensure the uniformity of the air flow; the three ventilation holes 2-1 are all connected with the circular tubular protective cover. 2. The circular surface of the inner tapered hole is tangent, so that the gas enters along the tangential direction; a disc 3-1 is arranged on the outer circumference of the lower end of the circular tube-shaped torch tube extension 3, and the outer circular surface of the disc 3-1 is conical , the middle part of the fixed plate 1 is provided with a through hole, the outer circular surface of the upper end of the circular tube-shaped protective cover 2 is embedded in the th...

specific Embodiment approach 2

[0021] Specific implementation mode two: combination figure 1 , figure 2 As shown, the difference between this specific embodiment and specific embodiment one is that the outer conical surface of the lower end disk 3-1 of the circular tube-shaped torch tube extension 3 is sealed with the lower end inner circular surface of the circular tube-shaped protective cover 2 When connecting, a plurality of air outlet holes 3-4 are uniformly arranged on the circumference of the disc 3-1 at the lower end of the circular tube-shaped torch tube extension 3, and the plurality of air outlet holes 3-4 and the annular air chamber 3-3 conduct gas connected. Other compositions and connections are the same as in the first embodiment.

[0022] Specific implementation mode two: combination figure 1 , figure 2 As shown, the difference between this specific embodiment and specific embodiment 1 lies in the difference between the outer conical surface of the lower end disk 3-1 of the circular tub...

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Abstract

The invention relates to an air-cooled plasma protecting gas hood nozzle, belongs to the technical field of plasma processing equipment and aims at solving the problem that a workpiece generates thermal stress resulting from influence of the surrounding environment on processing, insufficient reaction and overhigh processing temperature in an atmospheric plasma processing process. Inner holes of a tubular protecting hood are conical, and three air holes which are distributed at an interval of 120 degrees are formed in the inner side wall of the tubular protecting hood; the outer circle surface of a disc is conical; the outer circle surface of the upper end of a tubular torch tube extension piece is embedded in the inner hole in the upper end of the tubular protecting hood, and the outer conical surface of the disc at the lower end of the tubular torch tube extension tube and the inner circle surface of the lower end of the tubular protecting hood are connected in a sealing manner or separated by a gap; and when a gap is formed between the outer conical surface of the disc at the lower end of the tubular torch tube extension piece and the inner circle surface of the lower end of the tubular protecting hood, the gap is in gas-guiding communication with an annular gas cavity. According to the air-cooled plasma protecting gas hood nozzle, after gas is introduced, plasma can be effectively cooled, and the plasma temperature can be reduced, so that the atmospheric plasma can be processed into a temperature sensitive material, and the application scope of the atmospheric plasma can be widened.

Description

technical field [0001] The invention belongs to the technical field of plasma processing equipment. Background technique [0002] In recent years, there is an increasing demand for silicon-based large-scale precision optical components. Traditional methods of processing optical components lead to surface damage and sub-surface damage of optical components. Therefore, subsequent polishing is required, so the processing cycle is long and the efficiency is low. Plasma chemical polishing is to make the reactive gas in the active plasma, which stimulates the chemical reaction and generates a volatile mixed gas, thereby removing the surface material of the workpiece. Plasma polishing belongs to non-contact polishing, which avoids surface and subsurface damage, and has higher removal efficiency due to chemical reaction processing. [0003] Plasma chemical polishing has been widely used, but the existing plasma polishing device is carried out in a vacuum environment, which leads to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F3/00
Inventor 王波辛强姚英学金会良丁飞李娜金江李铎
Owner HARBIN INST OF TECH
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