Batch preparation continuous single-processing prediction control scheduling method
A technology of predictive control and scheduling method, applied in the direction of comprehensive factory control, comprehensive factory control, electrical program control, etc., can solve problems such as inapplicability
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[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0029] The overall flowchart of the predictive control scheduling method for batch preparation and continuous order processing in the present invention is shown in the attached figure 1 shown. Taking the electroplating process in the semiconductor back-end manufacturing process as an example to illustrate, figure 2 , image 3 Result plots of different scheduling methods. in, figure 2 In order not to predict in advance, an example diagram of manual scheduling that is commonly used by enterprises to start processing after a certain batch is met; image 3 An example diagram of predictive control scheduling proposed by the present invention. Comparing these two figures, it can be known that the use of the predictive control scheduling algorithm of the present invention meets the requirements of Makespan, minimizes the maximum completion tim...
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