Test sorting machine

Abstract

The invention relates to a test sorting machine. According to the invention, a technique capable of improving stability and reliability of a device by forming an cycling channel in a sidewall of a de-soak chamber to uniformly restore the temperature of semiconductor elements loaded on a test pallet moved to the de-soak chamber to a normal or preset temperature, and circulating air in the de-soak chamber through the channel by a special circulating device.

Description

technical field [0001] The invention relates to a testing and sorting machine for supporting the testing of semiconductor components before the produced semiconductor components are released from the warehouse. Background technique [0002] The test sorter is a device that supports semiconductor components manufactured through a specific manufacturing process so that they can be tested by a testing machine, and according to the test results, the semiconductor components are classified by grade and loaded on user trays. [0003] figure 1 A conceptual diagram of a conventional test sorter 100 that adopts a side-joint method, in which semiconductor components loaded on one side of the tester are supplied to one side of the tester in a state where the test tray is vertically erected, is viewed from a plan view. The selection machine 100 is composed of a test tray 110, a loading device 120, a SOAK CHAMBER 130, a test chamber (TEST CHAMBER) 140, a DESOAK CHAMBER 150, an unloading...

AI Technical Summary

Problems solved by technology

[0018] But if according to figure 2 In the prior art shown, the semiconductor elements that are scattered and loaded on the entire area of ​​the test tray 110, among the semiconductor elements that are located on the lower side of the heater 170, can return to the desired state within a predetermined short period of time. However, the semiconductor elements located on the upper side relatively away from the heater 170 cannot return to the deviation of the desired temperature within a predetermined short time.

In particular, the reason why the heat of the heater 170 cannot be smoothly transferred to the upper part of the test tray 110 during the low-temperature test is that the space between the test trays accommodated in the soaking chamber 150 is so narrow that it cannot Heat is smoothly delivered to the upper portion of the enlarged test tray 110

[0019] To solve the above problems, it is necessary to prolong the time that the test tray stays in the soaking chamber (the time that the test tray stays in the parallel movement inside the soaking chamber), but in this case the cycle time of the test tray becomes longer Reduce the processing capacity of the equipment

However, if it is necessary to expand the internal space of the soaking chamber to prolong the residence time of the test trays and maintain the processing capacity by increasing the number of test trays that can be accommodated in the soaking chamber, it is unnecessary to increase the size of the equipment. Said that the problem of rising production costs due to the need to make additional test trays will also arise

[0020] Therefore, in order to ensure the function of the soaking chamber while maintaining the existing equipment size, the applicant's research team has tried increasing the capacity of the heater or adding heaters / fans, etc., but has never obtained a worthy result. for satisfactory results

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