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Bench regulator using proximity switch

A technology of proximity switches and regulators, which is applied in metal processing equipment, grinding/polishing equipment, grinding/polishing safety devices, etc., can solve problems such as crushing grinding heads, grinding head damage, etc., and achieve the effect of increasing service life

Inactive Publication Date: 2013-12-04
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the prior art, the platform adjuster is usually used to roughen or clean the platform of the chemical mechanical grinding tool, but the grinding head of the platform adjuster, which is flexibly assembled by four bolts, is damaged and dropped to a random area many times, so , can cause some serious problems such as crushing the grinding head during the work process

Method used

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  • Bench regulator using proximity switch
  • Bench regulator using proximity switch

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Embodiment Construction

[0015] The present invention will be further elaborated below by describing a preferred specific embodiment in detail in conjunction with the accompanying drawings.

[0016] Such as figure 1 , figure 2 As shown, a platform regulator using a proximity switch includes: a grinding head 1, an adjusting arm 2 that drives the grinding head 1 to move up and down, and an electromagnetic valve 4 that controls the switch of the adjusting arm 2. In this embodiment, the electromagnetic valve 4 It adopts DC 24V power supply, and also includes: sensing device 3 and relay protection device 5 .

[0017] Among them, such as figure 2 As shown, the sensing device 3 is arranged between the grinding head 1 and the adjusting arm 2. One end of the sensing device 3 is connected to the external main controller through a cable, and the other end is grounded. In this embodiment, the sensing device 3 It is a proximity switch. When the external main control device controls the upward movement of the ...

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PUM

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Abstract

The invention discloses a bench regulator using proximity switch. The bench regulator comprises a grinding head, a regulating arm, a solenoid valve, a sensor and a relay protector, wherein the regulating arm drives the grinding head to move up and down and the solenoid valve controls on and off of the regulating arm. The sensor is disposed between the grinding head and the regulating arm. One end of the sensor is connected with an external master controller through a cable, and the other end of the sensor is grounded. When the external master controller controls the grinding head to move up through the solenoid valve, the sensor detects whether the grinding head is close to the regulating arm or not; if not, the sensor is off. The input end of the relay protector is connected with the external master controller, and the output end of the relay protector is connected with the input end of the solenoid valve. The bench regulator has the advantages that the grinding head is protected effectively, the service life of the grinding head is prolonged, and chips being ground by the grinding head and other parts can be protected effectively.

Description

technical field [0001] The invention relates to a platform regulator of a chemical mechanical grinding tool, in particular to a platform regulator using a proximity switch. Background technique [0002] In the prior art, the platform adjuster is usually used to roughen or clean the platform of the chemical mechanical grinding tool, but the grinding head of the platform adjuster, which is flexibly assembled by four bolts, will be damaged and dropped to a random area many times, so , may cause some serious problems such as crushing the grinding head during the working process. Contents of the invention [0003] The object of the present invention is to provide a platform adjuster using a proximity switch, which can effectively protect the grinding head, increase the life of the grinding head, and effectively protect the wafers and other components ground by the grinding head. [0004] In order to achieve the above object, the present invention is achieved through the follow...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B55/00
Inventor 张志慧龚大伟
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP