Marine biochemical substance monitoring sensor based on CMUT (Capacitive Micromachined Ultrasonic Transducer) as well as manufacturing method and measuring method of marine biochemical substance monitoring sensor

Abstract

The invention relates to a marine biochemical substance monitoring sensor based on CMUT (Capacitive Micromachined Ultrasonic Transducer) as well as a manufacturing method and a measuring method of the marine biochemical substance monitoring sensor. The overall structure of the sensor comprises an upper thin plate, an upper cavity, a vibration membrane, a lower cavity, a base, a sensitive material layer and a lower porous electrode from top to bottom, wherein the upper cavity and the lower cavity are respectively formed in the upper side and the lower side of the vibration membrane; the sensitive material layer is arranged on the lower surface of the base; the lower porous electrode is arranged on the lower surface of the sensitive material layer and provided with a through hole running through the thickness of the sensitive material layer; the vibration membrane is taken as an upper electrode at the same time. The sensor provided by the invention can be used for preventing the quality factors of the vibration membrane from being influenced by fluid damping in a liquid environment, so that the biochemical substances measurement with high sensitivity can be realized.

Description

technical field [0001] The invention belongs to the technical field of MEMS and biochemistry, in particular to a CMUT-based marine biochemical substance monitoring sensor and a preparation and measurement method thereof. Background technique [0002] The ocean occupies 70% of the earth's area and contains abundant available resources. As land resources become increasingly scarce or even exhausted, the development of marine resources and marine economy has become an important pillar of the national economy of coastal countries, especially coastal developed countries. At the same time, an important premise is to monitor and protect the marine environment, understand marine environmental information such as pH value, petroleum pollutants, heavy metal ions, toxins, etc., predict and prevent various biochemical pollution from destroying the marine environment, so as to ensure Sustainability of marine resource development and utilization. Therefore, sensors used to detect the co...

AI Technical Summary

Problems solved by technology

However, most of these biochemical sensors are based on some common CMUT structures, and when these structures are applied in the marine environment, there are also problems

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