Laser force measuring system for double-probe atomic force microscope

An atomic force microscope and dual-probe technology, applied in scanning probe technology, instruments, etc., can solve the problems of not having a probe force measurement system and not being able to realize three-dimensional operation of nanostructures

Inactive Publication Date: 2013-12-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the traditional atomic force microscope (AFM) cannot realize the three-dimensional operation of nanostructures because it does not have a probe force measurement system, and to provide a laser force measurement system for a double-probe atomic force microscope

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  • Laser force measuring system for double-probe atomic force microscope
  • Laser force measuring system for double-probe atomic force microscope

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specific Embodiment approach 1

[0014] Specific implementation mode 1: Combination figure 1 with figure 2 To illustrate this embodiment, the laser force measurement system for dual-probe atomic force microscopes in this embodiment includes a first laser mechanics subsystem and a second laser mechanics subsystem. The first laser mechanics subsystem is used to detect double The signal of the first probe arm of the probe atomic force microscope, the second laser mechanics subsystem is used to detect the signal of the second probe arm of the double probe atomic force microscope, the first laser mechanics subsystem and the second laser mechanics The structure of the system is the same. The first laser mechanics subsystem includes a laser angle adjustment mechanism 1, a laser 2, an incident light convex lens 9, and an incident convex lens adjustment mechanism 4 used to adjust the position of the incident light convex lens 9. Mirror 8, reflective laser convex lens 5, reflective convex lens adjustment mechanism 6 fo...

specific Embodiment approach 2

[0018] Specific implementation manner two: combination figure 1 with figure 2 To explain this embodiment, the difference between this embodiment and the laser force measurement system for dual-probe atomic force microscopes described in the first embodiment is: in the first laser mechanics subsystem, the laser light emitted by the laser 2 passes through the first probe The laser light reflected by the needle tip of the arm and the laser light reflected by the mirror 8 are in the same plane, and the plane is the S1 surface; in the second laser mechanics subsystem, the laser light emitted by the laser 2 passes through the needle tip of the first probe arm The reflected laser light and the laser light reflected by the mirror 8 are in the same plane, and the plane is the S2 plane.

[0019] The lasers in each laser mechanics subsystem are in the same plane. This layout can save space so that other test or control systems can be added to achieve more functions.

specific Embodiment approach 3

[0020] Specific implementation mode three: combination figure 1 with figure 2 To describe this embodiment, the difference between this embodiment and the laser force measurement system for a dual-probe atomic force microscope described in the second embodiment is that the S1 surface and the S2 surface overlap.

[0021] This layout can save space to the greatest extent.

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Abstract

The invention discloses a laser force measuring system for a double-probe atomic force microscope, belongs to the technical field of the three-dimensional operation of nano-structures or nanometer devices, and particularly relates to the force measuring technology of atomic force microscope probes. The laser force measuring system aims to solve the problem that a traditional AFM cannot achieve the three-dimensional operation of the nano-structures due to the fact that the traditional AFM is not provided with a probe force measuring system. The laser force measuring system comprises two sets of independent laser mechanics subsystems, and the distribution of the independent laser mechanics subsystems corresponds to the distribution of two probes, and the independent laser mechanics subsystems are of a bilaterally symmetric structure. Two four-quadrant position detectors in the laser mechanics subsystems are respectively used for measuring the stress deformation degree of each probe, so that the nanoscale precision positioning of the positions of the two probes and the precise detection and control of operation force are achieved, and then the three-dimensional operation of the nano-sturctures is achieved. The laser force measuring system is suitable for the field of nana manufacturing, testing, characterization and biology.

Description

Technical field [0001] The invention relates to the technical field of three-dimensional operation of nanostructures or nanodevices, in particular to the force measurement technology of an atomic force microscope probe. Background technique [0002] Nanomanipulation and assembly are important means to realize the manufacture of nanostructures and nanodevices. How to realize the three-dimensional acquisition, movement and assembly of nanoparticles, nanowires, nanotubes, and other nanostructures, as well as characteristic testing, is the manufacture of nanostructures and nanodevices. key. The traditional atomic force microscope (AFM) only has one probe, and its main function is to achieve atomic to nanometer precision scanning imaging. It can also realize the operation of nanomaterials in a two-dimensional plane, but it cannot realize the three-dimensional operation of nanomaterials. Such as the three-dimensional ingestion and movement of nanoparticles, nanowires, nanotubes, and o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q20/02
Inventor 谢晖荣伟彬孙立宁
Owner HARBIN INST OF TECH
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