Measurement Method of Curvature Radius of Vertex of Differential Confocal Paraboloid
A technology of differential confocal and vertex curvature, which is applied in the direction of measuring devices, instruments, and optical devices, etc., to achieve the effect of improving the sensitivity of focusing and improving the accuracy of focusing
Active Publication Date: 2016-03-30
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
Affected by the axial normal aberration and the measurement accuracy of the included angle, the measurement accuracy of the vertex curvature radius of this method can only reach 3%.
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Embodiment 1
[0034] In the example, the diameter of the tested paraboloid 6 is 30mm, and the designed radius of curvature of the vertex is 48mm. It is calibrated by the contact measurement method using the UA3P three-coordinate measuring instrument by the Chinese Academy of Metrology. The radius of curvature of the vertex is 47.976mm, and the curvature of the vertex is 47.976mm. The steps for measuring the radius are:
[0035] (a) Start the measurement software in the main control computer 21, turn on the laser 20, and the light emitted by the laser 20 is transmitted through the optical fiber 19 to form a point light source 1. The light emitted by the point light source 1 passes through the beam splitter 2, the collimating lens 3 and the objective lens 4, and then passes through a part of the plane reflector 5 to form a measuring beam. Adjust the part of the plane reflector 5 so that it is co-axial with the objective lens 4;
[0036] (b) Place the tested paraboloid 6 on the four-dimensional adj...
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The invention belongs to the technical field of optical precision measurement, and relates to a method for measuring a differential motion confocal paraboloid vertex curvature radius. The character that a paraboloid can collimate beams focused on the focus of the paraboloid into parallel beams in an aberrationless mode is utilized, a self-reflective light path is constructed by combining part of plane reflection mirrors, the vertex and the focus position of the paraboloid are accurately positioned by utilizing the zero crossing point position of a differential motion confocal response curve so as to accurately measure and obtain the focal length and the vertex curvature radius value of the paraboloid. The method puts forwards the suggestion of expanding the differential motion confocal measuring technology to the paraboloid vertex curvature radius measuring field for the first time, the method has the advantages of being high in measuring precision and strong in environmental disturbance resistance capability, and the method can be used for detecting the paraboloid vertex curvature radius in a high-precision mode.
Description
Technical field [0001] The invention belongs to the technical field of optical precision measurement, and can be used for the detection of the parabolic focal length and the vertex curvature radius and the high-precision parabolic focal length and vertex curvature radius measurement during the assembly process of the optical system. technical background [0002] Because the parabolic surface can focus the parallel beam to the focal point without aberration, it is widely used as an important aspheric surface in optical systems such as reflective astronomical telescopes, space optical communications, and earth observation cameras. The radius of curvature of the vertex of the paraboloid determines the focal length and image quality of the optical system, so the measurement of the radius of curvature of the vertex of the paraboloid is of great significance. [0003] At present, the methods that can be used to measure the radius of curvature of the parabolic apex mainly include contact ...
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IPC IPC(8): G01B11/255
Inventor 赵维谦杨佳苗邱丽荣康丽张鑫王旭
Owner BEIJING INSTITUTE OF TECHNOLOGYGY