Wafer-level optoelectronic device packaging and manufacturing method thereof
A wafer and photodetector technology, applied in semiconductor/solid-state device manufacturing, electrical solid-state devices, electrical components, etc., to solve problems such as increasing bills of materials, increasing cycle time, and rising manufacturing costs
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[0022] image 3 , including the section image 3 (a)-3(i), are used to illustrate the fabrication of an optoelectronic device (and more particularly, a plurality of such devices) according to certain embodiments of the present invention. For example, refer to image 3 The process described can be used to produce the previously referenced figure 2 An optoelectronic device 202 is depicted.
[0023] refer to image 3 (a), a plurality of photodetector sensor areas 306 are shown formed in a silicon wafer 304 . A through-silicon via (TSV) process is performed to form holes 308 that will provide between components connected to the top of the wafer 304 and electrical contacts (such as solder balls) that will be formed on the bottom of the wafer after the wafer is background electrical connection. For example, a standard TSV process with plasma etching may be used to form partial depth openings (drilled holes) into wafer 304 . The partial depth TSV process can be performed at th...
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