Measurement device for thin film pressure sensor

Abstract

The invention relates to a measurement device for a thin film pressure sensor. The measurement device comprises a measurement mechanism and a control and signal acquisition part, wherein the measurement mechanism comprises a screw rod, a cross beam bracket, a step motor, a cross beam, a force sensor, a linear bearing, a shaft, a spring, upper and lower electrodes, upper and lower supporting plates and a supporting column; the measurement mechanism is characterized in that the force sensor is fixed to the cross beam; the cross beam is sleeved with the screw rod; the step motor can be used for driving the screw rod to rotate and driving the cross beam to rotate up or down; the shaft is fixed at the lower end of the force sensor and arranged in the linear bearing; the spring is connected to the lower end of the shaft; the lower end of the spring is fixed to an insulated connecting column; the insulated connecting column is connected with the upper electrode; the thin film pressure sensor to be measured is arranged between the upper and lower electrodes; the two connecting points of the upper and lower electrodes can be connected with an external voltage resistance measurement unit. The measurement device has the advantages of simplicity for operation, high pressure measurement precision and the like.

Description

technical field [0001] The invention relates to a device for measuring pressure, in particular to a measuring device for a thin film pressure sensor. Background technique [0002] There have been many studies on the use of polymers such as PVDF as flexible pressure sensors. Since the thickness of the film material is very small, generally ranging from a few mm to a few microns, it is impossible to measure the relationship between the output signal and the pressure with a general strength instrument. The measurement of the relationship, using a constant force measuring device to measure the piezoelectric properties of the film material is a method that is currently used more, that is, placing a certain weight on the film, and measuring the two sides of the film through a voltage resistance measuring device. The output of the signal, this measurement method has the advantages of simple device (only need weights and a voltage or current measuring meter) and low cost, but its di...

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Problems solved by technology

[0002] There have been many studies on the use of polymers such as PVDF as flexible pressure sensors. Since the thickness of the film material is very small, generally ranging from a few mm to a few microns, it is impossible to measure the relationship between the output signal and the pressure with a general strength instrument. The measurement of the relationship, using a constant force measuring device to measure the piezoelectric properties of the film material is a method that is currently used more, that is, placing a certain weight on the film, and measuring the two sides of the film through a voltage resistance measuring device. The output of the signal, this measurement method has the advantages of simple device (only need weights and a voltage or current measuring meter) and low cost, but its disadvantages are also obvious, this method cannot measure the pressure of the entire range range correspondingly , and the measurement process takes a lot of time, the measurement can only be a static measurement

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