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Method for manufacturing adsorption table and the adsorption table

A manufacturing method and platform technology, applied in the direction of manufacturing tools, auxiliary welding equipment, welding equipment, etc., to achieve the effect of preventing the decline of attractive force

Inactive Publication Date: 2014-02-12
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, since the material of the ceramic plate is relatively brittle, especially the brittleness of the porous ceramic material is high, it is difficult to process precisely as described above. Figure 7 Complicated slots with an inverted T-shape in the section shown, or screw holes for screwing in reference pins, etc.

Method used

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  • Method for manufacturing adsorption table and the adsorption table
  • Method for manufacturing adsorption table and the adsorption table
  • Method for manufacturing adsorption table and the adsorption table

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Embodiment Construction

[0044] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the following in conjunction with the accompanying drawings and preferred embodiments, a specific implementation method, Structure, characteristic and effect thereof are as follows in detail.

[0045] Hereinafter, the manufacturing method of the adsorption|suction platform of this invention is demonstrated in detail based on drawing which shows the Example. Fig. 1 represents the sectional view of the state when the adsorption platform of the present invention is in use, figure 2 Represent the perspective view of the state after the cushioning material of the adsorption platform of Fig. 1 is removed, image 3 Representing the exploded perspective view of the adsorption platform of Fig. 1, Figure 4 An explanatory view showing a method of manufacturing the adsorption platform of FIG. 1 .

[0046] The adsorption platform A is formed by ...

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Abstract

The invention provides a method for manufacturing a porous ceramic adsorption table embedded with buffering material and the adsorption table obtained through the manufacturing method. The method comprises the steps of processing a lower slot on the lower surface of an upper laminated plate formed by porous ceramic material into an enclosed curve, processing a through slot, which is narrow than the lower slot and penetrates through the upper surface of the upper laminate plate to the low slot, into an inverted T shape so as to separate the upper laminate plate into a frame member and a central member of an absorption area, coating hermetical painting on the inner side surface of the frame member and the outer side surface of the central member, placing the upper laminate plate on the upper surface of an intermediate laminate plate in such a manner that the central member of the upper laminate plate is embedded in the frame member, and jointing the upper laminate plate and the intermediate laminate plate after fixing the central member on the center of the frame member with tools.

Description

technical field [0001] The present invention relates to a method for processing scribed grooves (grooves for cutting) on ​​brittle material substrates such as glass, silicon, ceramics (LTCC substrates, etc.), compound semiconductors (hereinafter collectively referred to as substrates) or along the scribed grooves. A method for manufacturing an adsorption platform that adsorbs and holds the substrate when the groove is broken, and the adsorption platform. Background technique [0002] Adsorption platforms used in substrate processing devices such as scribing devices or breaking devices are known as Image 6 As shown, a plurality of air suction holes 11 are opened toward the substrate mounting surface 12 on the metal platen 10 . Each air suction hole 11 is connected to a manifold 11a in a hollow space at the lower part of the platen, and suction is carried out from the air suction hole 11 through the manifold 11a by an external vacuum pump P, thereby adsorbing and placing the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25B11/00
CPCB25B11/005B23K26/20B23K26/702B23K37/0443B23K2103/52
Inventor 冈岛康智三谷卓朗林将圭
Owner MITSUBOSHI DIAMOND IND CO LTD
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