Adsorption platform manufacturing method and adsorption platform

A manufacturing method and platform technology, applied in the direction of manufacturing tools, auxiliary welding equipment, welding equipment, etc., to achieve the effect of preventing the decline of attractive force

Inactive Publication Date: 2017-04-26
MITSUBOSHI DIAMOND IND CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, since the material of the ceramic plate is relatively brittle, especially the brittleness of the porous ceramic material is high, it is difficult to process precisely as described above. Figure 7 Complicated slots with an inverted T-shape in the section shown, or screw holes for screwing in reference pins, etc.

Method used

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  • Adsorption platform manufacturing method and adsorption platform
  • Adsorption platform manufacturing method and adsorption platform
  • Adsorption platform manufacturing method and adsorption platform

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Embodiment Construction

[0044] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the following in conjunction with the accompanying drawings and preferred embodiments, a specific implementation method, Structure, characteristic and effect thereof are as follows in detail.

[0045] Hereinafter, the manufacturing method of the adsorption|suction platform of this invention is demonstrated in detail based on drawing which shows the Example. Fig. 1 represents the sectional view of the state when the adsorption platform of the present invention is in use, figure 2 Represent the perspective view of the state after the cushioning material of the adsorption platform of Fig. 1 is removed, image 3 Representing the exploded perspective view of the adsorption platform of Fig. 1, Figure 4 An explanatory view showing a method of manufacturing the adsorption platform of FIG. 1 .

[0046] The adsorption platform A is formed by ...

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Abstract

The present invention provides a method for manufacturing a porous ceramic absorption table in which a cushion material is fitted and an absorption table manufactured by the method. The present invention comprises: a step of processing a lower groove (1b') on the underside of a porous ceramic upper plate (1) as a looped curve shape; a step of penetrating a penetrated groove (1b") with a narrower width than the lower groove (1b') from the top of the upper plate (1) to the lower groove as a reversed T-shaped groove (1b) and dividing the upper plate (1) into a frame member (1c) and a center member (1d) to be an absorption area; a step of coating the inner surface of the frame member (1c) and the outer surface of the center member (1d) with a nonpermeable coating material; and a step of bonding the upper plate (1) and an intermediate plate (2) after the center member (1d) is positioned at the center of the frame member (1c) by an attachment jig (9) by placing the upper plate on the top of an intermediate plate (2) in a state where the center member (1d) of the upper plate (1) is fitted in the frame member (1c).

Description

technical field [0001] The present invention relates to a method for processing scribed grooves (grooves for cutting) on ​​brittle material substrates such as glass, silicon, ceramics (LTCC substrates, etc.), compound semiconductors (hereinafter collectively referred to as substrates) or along the scribed grooves. A method for manufacturing an adsorption platform that adsorbs and holds the substrate when the groove is broken, and the adsorption platform. Background technique [0002] Adsorption platforms used in substrate processing devices such as scribing devices or breaking devices are known as Figure 6 As shown, a plurality of air suction holes 11 are opened toward the substrate mounting surface 12 on the metal platen 10 . Each air suction hole 11 is connected to a manifold 11a in a hollow space at the lower part of the platen, and suction is carried out from the air suction hole 11 through the manifold 11a by an external vacuum pump P, thereby adsorbing and placing the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25B11/00
CPCB25B11/005B23K26/20B23K26/702B23K37/0443B23K2103/52
Inventor 冈岛康智三谷卓朗林将圭
Owner MITSUBOSHI DIAMOND IND CO LTD
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