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Vibrating plate, vibrator, oscillator and electronic equipment

A vibrating plate and vibrator technology, which is applied in the fields of oscillators and electronic equipment, vibrating plates, and vibrators. It can solve problems such as Q value reduction, vibration leakage, and easy deformation of the base.

Active Publication Date: 2017-11-28
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In such a vibrating piece, there is a problem that the base is easily deformed due to the bending vibration of the two vibrating arms in the in-plane direction, vibration leakage occurs due to the deformation, and the Q value decreases

Method used

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  • Vibrating plate, vibrator, oscillator and electronic equipment
  • Vibrating plate, vibrator, oscillator and electronic equipment
  • Vibrating plate, vibrator, oscillator and electronic equipment

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0074] figure 1 It is a plan view showing the vibrating piece according to the first embodiment of the present invention, figure 2 yes figure 1 A-A line sectional view in, image 3 is a top view showing the vibrating plate used for the simulation, Figure 4 It is a plan view illustrating the principle of suppressing vibration leakage. In addition, in each figure, for convenience of explanation, an X axis, a Y axis, and a Z axis are shown as three axes perpendicular to each other. In addition, in the following description, for the convenience of description, the figure 1 The upper side is called "upper" and the lower side is called "lower". In addition, for convenience of explanation, the plan view when viewed from the Z-axis direction is simply referred to as "plan view".

[0075] figure 1 and figure 2 The vibrating piece 200 shown has a vibrating substrate 210 and driving electrodes formed on the vibrating substrate 210 .

[0076] The vibration substrate 210 is mad...

no. 2 Embodiment approach

[0103] Next, a second embodiment of the present invention will be described.

[0104] Figure 5 It is a plan view of the vibrating element according to the second embodiment of the present invention.

[0105] Hereinafter, the second embodiment will be described focusing on the points of difference from the above-described embodiments, and descriptions of the same matters will be omitted.

[0106] The second embodiment is basically the same as the first embodiment except that the structure (shape) of the first narrowed portion is different. In addition, in Figure 5 In , the same reference numerals are assigned to the same configurations as those in the first embodiment described above.

[0107] exist Figure 5 In the vibrating piece 200A shown, the outline of the first reduced-width portion 222A is constituted by an arc-shaped arc portion 222c that is a symmetrical shape bounded by the axis of symmetry Y′. Each corner on the side of the -Y axis direction is connected. Th...

no. 3 Embodiment approach

[0114] Next, a third embodiment of the present invention will be described.

[0115] Figure 6 It is a plan view of the vibrating element of the third embodiment of the present invention.

[0116] Hereinafter, regarding the third embodiment, differences from the above-described embodiments will be mainly described, and descriptions of the same matters will be omitted.

[0117] The third embodiment is basically the same as the first embodiment except that the structure (shape) of the first reduced-width portion is different. In addition, in Figure 6 In , the same reference numerals are assigned to the same configurations as those in the first embodiment described above.

[0118] exist Figure 6 In the vibrating piece 200B shown, the maximum width (maximum length in the X-axis direction) Wmax of the first reduced-width portion 222B is smaller than the width W of the main body portion 221 . Therefore, the first narrowed-width portion 222B is formed to be connected to the ce...

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PUM

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Abstract

The present invention provides a vibrating piece, a vibrator, an oscillator and electronic equipment capable of suppressing vibration leakage and having good vibration characteristics. The vibrating piece (200) includes: a base (220); a pair of vibrating arms (230, 240), which protrude from the base (200) in the direction of the +Y axis, and are separated from each other in the X direction crossing the Y axis when viewed from above. arranged at a distance; and a support arm (250), located between a pair of vibrating arms (230, 240), protruding from the base (220) toward the +Y axis direction. The base (220) includes a first reduced-width portion (222) located on a side opposite to a side where the support arm (250) protrudes from the center of the base (220), and , within the range of the separation distance, the length of the first narrowing portion ( 222 ) in the X-axis direction gradually decreases as it moves away from the support arm ( 250 ) in plan view.

Description

technical field [0001] The invention relates to a vibrating piece, a vibrator, an oscillator and electronic equipment. Background technique [0002] As a vibration device such as a quartz oscillator, a vibration device including a tuning-fork-type vibrating piece having a plurality of vibrating arms is known (for example, refer to Patent Document 1). The vibrating piece of Patent Document 1 has a substantially rectangular base in plan view, two vibrating arms extending from the base in parallel to each other, and a support portion extending from the base between the two vibrating arms. . In such a vibrating piece, there is a problem that the base is easily deformed due to the bending vibration of the two vibrating arms in the in-plane direction, and vibration leakage occurs due to the deformation, resulting in a decrease in the Q value. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2002-141770 Contents of the invention [0004] An object of the present inven...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/215
CPCH03H9/215H03H9/19H03H9/21
Inventor 山田明法
Owner SEIKO EPSON CORP