On-line detection equipment and detection method for chemical filter service life
A chemical filter and testing equipment technology, applied in the testing of machine/structural components, detecting fluid flow by measuring differential pressure, instruments, etc., can solve problems such as high cost and long cycle, and achieve low cost, simple operation, and easy use. Portable effect
Active Publication Date: 2016-12-28
S Y TECH ENG & CONSTR CO LTD
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However, this detection method is costly, takes a long time and requires the use of expensive experimental analysis instruments
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[0029] An on-line detection device for the service life of a chemical filter, the device includes a test head, an air pump and an air pressure tester, the device does not directly measure the gas flow through the filter to detect the service life of the filter, but measures the The pressure change in the container is used to deduce the flow rate of the gas leaking out of the constant volume equipment under the standard condition, and the working principle design of the life detection is realized by using the relationship between the saturation degree of the chemical filter and the ventilation performance.
[0030] Wherein, the device, according to the ideal gas state equation PV=nRT, in the formula, P is the gas pressure, the unit is Pa, and V is the gas volume, the unit is m 3 , n is the amount of substance of the gas, unit mol, T is the system temperature, unit K, R is a proportional coefficient, and the described equipment is a constant volume device with a volume of V. Sinc...
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At present, chemical filters are widely used in IC, TFT, OLED, PDP and other electronic factories. However, there is currently no suitable field test method for the life of chemical filters. At present, the commonly used inspection method is to sample the chemical atmosphere at the air inlet and air outlet of the chemical filter, and then take the sampled samples to the laboratory for analysis. If the results of the analysis show that the concentration of the chemical atmosphere at the air inlet and outlet is basically unchanged, it means that the service life of the chemical filter has been reached. However, this detection method cannot be used for online detection, and the detection cost is high, the cycle is long, and expensive experimental analysis instruments are required. The purpose of the present invention is to address the deficiencies in the prior art and provide a chemical filter life detection device with low detection cost, good real-time performance, convenient use and simple operation and a detection method using the device.
Description
technical field [0001] The invention relates to air filtering equipment, in particular to an online life detection equipment and detection method of a chemical filter used to filter and remove chemical substances in the air. Background technique [0002] Chemical filters are indispensable in the production process of high-performance flat panel displays and semiconductor ICs. The purpose of installing chemical filters is to remove the unfavorable chemical atmosphere in the production environment. [0003] Semiconductor manufacturing processes, precision products or electronic product manufacturing processes, etc. are generally carried out in a clean room that excludes pollutants. Therefore, the degree of pollution in the clean room is an important factor directly related to the yield of manufactured products. [0004] Moreover, due to the high integration of recent semiconductor devices, the diameter of wafers used to manufacture such semiconductor devices is also increasing...
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IPC IPC(8): G01M99/00G01F1/34
Inventor 李卫李强黄文胜
Owner S Y TECH ENG & CONSTR CO LTD