Semiconductor device, temperature control method thereof, and test system
A temperature control method and temperature control technology, which are applied in the direction of using electric means for temperature control to achieve the effect of reducing the number of
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[0033] Reference will now be made in detail to embodiments of the invention, which are illustrated in the accompanying drawings. However, inventive concepts may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In addition, elements / members using the same reference numerals in the drawings and embodiments represent the same or similar parts.
[0034] figure 1 is a schematic diagram of a test system according to an embodiment of the present invention. figure 2 is a schematic diagram of the test temperature according to an embodiment of the present invention. image 3 is a test flow chart according to an embodiment of the present invention. Please refer to figure 1 , figure 2 and image 3 . The test system 100A includes a test machine 110 and a semiconductor device 120 . The semiconductor device 120 to be tested includes a temperature control unit 130 and heating units 140_1 , 140_2 . The testing machine 11...
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