Working volume measuring device and method for reducing device wall air outlet error

A technology of volume measurement and reducer, which is applied in the field of volume measurement, can solve problems such as adverse effects on measurement results, and achieve the effect of improving the accuracy of volume measurement

Inactive Publication Date: 2014-05-21
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, when the capacitance film vacuum gauge is used to measure the pressure, it will be affected by the heat flow effect, which will have an adverse effect on the measurement results. In addition, the above method cann

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  • Working volume measuring device and method for reducing device wall air outlet error

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Embodiment Construction

[0017] Embodiments of the present invention will be described below with reference to the drawings. Elements and features described in one drawing or one embodiment of the present invention may be combined with elements and features shown in one or more other drawings or embodiments. It should be noted that representation and description of components and processes that are not related to the present invention and known to those of ordinary skill in the art are omitted from the drawings and descriptions for the purpose of clarity.

[0018] figure 1 The principle diagram of the working volume measuring device for reducing the gas outlet error of the wall provided by the embodiment of the present invention, such as figure 1 As shown, the working volume measurement device for reducing the wall outlet error provided by the embodiment of the present invention includes a working volume body 3 and a reference volume body 5, and the working volume body 3 and the reference volume body...

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Abstract

The invention provides a working volume measuring device and method for reducing a device wall air outlet error. The device comprises a working volume body and a reference volume body which are connected through a first valve, the reference volume body is connected with a first non-evapotranspiration getter pump through a second valve, the reference volume body is connected with an air exhausting system through a third valve, the working volume body is connected with a second non-evapotranspiration getter pump through a fourth valve, and the working volume body is connected with a vacuum meter. According to the scheme, the active gases separating from absorbing on the wall of the working volume body and the wall of the reference volume body are correspondingly and selectively pumped through the first non-evapotranspiration getter pump and the second non-evapotranspiration getter pump, the static pressure inside the working volume body and the static pressure inside the reference volume body are kept, and the volume measuring precision of the working volume body is further improved.

Description

technical field [0001] The invention relates to the technical field of volume measurement, in particular to a working volume measurement device and method for reducing the gas outlet error of a vessel wall. Background technique [0002] The high-speed gas micro-flow meter of gas micro-flow standard is mainly used for the measurement of gas micro-flow, in which the measurement progress of the volume value of the working volume body determines the measurement accuracy of gas micro-flow. At present, the static expansion method is generally used to measure the volume value of the working volume body of a high-precision gas micro-flow meter. [0003] Adopting the above method has the advantages of in-situ measurement, simple operation and the like. However, when the capacitance film vacuum gauge is used to measure the pressure, it will be affected by the heat flow effect, which will have an adverse effect on the measurement results. In addition, the above method cannot avoid the...

Claims

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Application Information

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IPC IPC(8): G01F17/00G01F25/00
Inventor 习振华成永军张伟文孙雯君马奔魏万印盛学民
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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