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OHT system with safety shield

A technology of safety baffles and baffles, which is applied in the field of OHT systems, can solve problems such as poor safety performance, and achieve the effects of avoiding personnel from entering and causing injuries, low cost, and solving potential safety hazards

Inactive Publication Date: 2014-06-25
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this patent still has the problem of poor safety performance

Method used

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  • OHT system with safety shield
  • OHT system with safety shield

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Experimental program
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Effect test

Embodiment Construction

[0022] The method of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0023] Such as figure 1 As shown in , an OHT system provided with a safety baffle according to an embodiment of the present invention includes a transport vehicle 1 , a transport rail 2 and a loading platform 3 . The transport vehicle 1 is slidably arranged on the transport track 2 , and one end of the transport track 2 is located above the loading platform 3 . Wherein, it also includes a safety baffle 4 that can be opened and closed. The safety baffle 4 is arranged on the outside of the loading platform 3 . When the safety baffle 4 is closed, the safety baffle 4 separates the working area of ​​the OHT system and the loading platform 3 from the outside area, and when the safety baffle 4 is opened, the safety baffle 4 communicates the working area of ​​the OHT system with the outside area .

[0024] Such as figure 2 As shown in , the embodiment of ...

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PUM

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Abstract

The invention discloses an OHT system with a safety shield, comprising a carrier, a carrying track, a loading platform and an openable safety baffle. The carrier is arranged on the carrying track in a sliding manner; one end of the carrying track is positioned above the loading platform; the safety baffle is positioned outside of the loading platform; when the safety baffle is closed, the safety baffle separate the working area of the OHT system from the outside area; when the safety baffle is opened, the safety baffle allow the working area of the OHT system to be communicated with the outside area. The technical scheme of the invention has low cost, turns passive protection into active protection, solves safety hazard of OHT operation, and prevents people from getting into accidentally and getting hurt, and is easy to operate.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to an OHT system provided with a safety baffle. Background technique [0002] At present, the existing 300mm fab (chip factory) widely adopts the OHT (over-head handling vehicle, OVER-HEAD HOIST TRANSPORTATION) system operation, and uses the trolley instead of manual work to move the foup (Front Opening Unified Pod) to the process tool ( tooling). Automatic operation not only saves manpower and improves transport speed, but also brings certain safety hazards. For example, when the trolley puts the foup on the load port (loading platform), if the trolley look down sensor fails , and if someone happens to enter the OHT work area at this time, the falling foup will directly hit the person, posing a great potential safety hazard. [0003] The Look down sensor emits infrared rays of a specific frequency to the load port of the machine. Under the condition of no obstacles, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/677
Inventor 秦贵明裴雷洪俞玮
Owner SHANGHAI HUALI MICROELECTRONICS CORP