Complex compliant mechanism deformation precision test equipment and measuring method

Abstract

The invention relates to complex compliant mechanism deformation precision test equipment and a measuring method. The test equipment comprises a z axis adjustment unit, a compliant mechanism unit under test, a contact detection unit and a test-piece macro dynamic adjustment unit. The z axis adjustment unit is connected with a side plate, the compliant mechanism unit under test is arranged at the lower end of a transition connecting piece a of the z axis adjustment unit, the test-piece macro dynamic adjustment unit is connected with a base, and the contact detection unit is connected to the test-piece macro dynamic adjustment unit through a transition connecting piece b. According to the precise measuring method, scratch morphology remaining on the surface of a test-piece when a complex compliant mechanism is deformed is obtained by the adoption of the scratch test principle, and deformation characteristics of the complex compliant mechanism is obtained through research on and further analysis of the scratch morphology. The complex compliant mechanism deformation precision test equipment and the measuring method have the advantages that precision measurement of the complex compliant mechanism deformation can be achieved, and a new technical means used for design and analysis of the compliant mechanism widely applied to the fields of precision positioning, precision machining, micromanipulation, micro clamping and the like is provided.

Description

technical field [0001] The invention relates to a precision testing device and measurement method for the deformation of a complex compliant mechanism, which can be used for precise measurement of the deformation of a compliant mechanism that is widely used in the fields of precision positioning, precision machining, micromanipulation, and micro-clamping. Analytics provide new technical means. Background technique [0002] Compliant mechanisms have a wide range of applications in ultra-precision machining, micromanipulation, scanning systems, micro-nano mechanical testing, micro-clamping and other fields. The design and analysis of compliant mechanisms play an important role in realizing their functions. In practice, theoretical analysis methods, finite element calculations, and experimental methods are usually combined and applied to the design and parameter optimization of compliant mechanisms to design specific compliant mechanisms to meet specific applications. [...

AI Technical Summary

Problems solved by technology

However, for some special applications, it is necessary to design complex, hybrid compliant mechanisms with multi-hinge structures or long motion conversion structures

In this case, it is difficult to obtain the output characteristics of complex and hybrid compliant mechanisms through theoretical analysis, often requiring a large number of simplifications and assumptions, resulting in inconsistencies between theoretical analysis results and actual output characteristics

On the other hand, considering that these complex and hybrid compliant mechanisms often have multiple degrees of freedom or parasitic motion outputs, it is difficult to directly measure their motion characteristics precisely through existing displacement sensors.

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