Static microrelay based on bistable compliant mechanism

A flexible mechanism and micro-relay technology, applied in the direction of electrostatic relays/electro-adhesion relays, relays, circuits, etc., can solve problems such as complex structures, and achieve the effects of large working strokes, low energy consumption, and low driving voltage
CN101834097AInactive Publication Date: 2010-09-15DALIAN UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
DALIAN UNIV OF TECH
Publication Date
2010-09-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a static microrelay based on a bistable compliant mechanism, belonging to static relays used in a micro-electro mechanical system (MEMS). Bistable fully-compliant beams of the static microrelay adopt two compliant beams, wherein one end of the left compliant beam is fixed on a left insulated anchor point, and the other end of the left compliant beam is fixed on a member; one end of the right compliant beam is fixed on a right insulated anchor point, and the other end of the right compliant beam is also fixed on the member; under the voltage drive, a movable comb tooth drives the bistable fully-compliant beams to transversely move and rapidly overturn to a second stable position; a movable contact is in bridging connection with a left fixed contact and a right fixed contact which are fixed on a lower insulated anchor point so as to switch a circuit on; and the relay is rapidly skipped to return to a first stable position when an aelotropic driving voltage is applied. The static microrelay substitutes a traditional linear elasticity structure by adopting the bistable compliant mechanism so as to improve the response speed and the stable holding capacity and has the characteristics of simple mechanism, short-distance drive, low energy consumption and strong anti-jamming capacity.
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Description

technical field

[0001] The invention relates to an electrostatic micro-relay based on a bistable flexible mechanism, which belongs to the electrostatic relay used in micro-electro-mechanical systems (MEMS), and is mainly used in communication engineering, information processing, industrial control, instrumentation and other systems. Background technique

[0002] The micro-electromechanical relay based on micro-mechanical system (MEMS) technology realizes the switching of the circuit through the pull-in and disconnection of metal electrodes. It has small size, small weight, easy integration, wide bandwidth, fast response, low power consumption, and is suitable for With the advantages of mass production, it has a wide demand in communication, aerospace, automatic detection equipment and other systems.

[0003] In recent years, many units and research institutions have devoted themselves to the research on the structure and driving form of micro-relays, including electrostatic ...

Claims

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