Low threshold voltage electrostatic micro-relay
A low-threshold voltage, micro-relay technology, applied in electrostatic relays/electro-adhesion relays, relays, circuits, etc., can solve problems such as reducing driving voltage and compatibility, reducing contact resistance, simple manufacturing process, and increasing contacts. Effect of load current
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[0021] The present invention will be further described below in conjunction with the accompanying drawings.
[0022] The low-threshold voltage electrostatic micro-relay includes a pressure welding block 101, a movable comb 102 and a fixed comb 103, a contact 104, an isolation barrier 105, a folding spring beam 106, a multi-stage comb connection beam 107, an isolation wall 108, and a lining. Bottom 201, in which the pressure welding block 101 is used to apply electrical excitation; two or more movable comb teeth 102 are connected in parallel, and two or more fixed comb teeth 103 are connected in parallel. The number of movable comb teeth and fixed comb teeth are equal and arranged at intervals to form The cascaded comb tooth structure has more than two prongs 301 on the movable comb, and more than two prongs 302 on the fixed comb. The corresponding prongs 301 on the movable comb and the prongs on the fixed comb The teeth 302 are equal in number and arranged in a staggered form at i...
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