The invention relates to a
metal structure electrostatic-driven MEMS
relay and a preparation method thereof, belonging to the technical field of design and manufacture of relays. The
metal structure electrostatic-driven MEMS
relay is characterized in that the
relay is a structure which is fixed and supported at two ends and is divided into an upper active pole plate 7 and a lower fixed pole plate4, the upper active pole plate is referred to as an upper pole plate, the lower fixed pole plate is referred to as a
lower pole plate, and the pole plates are both made of
metal, thereby being capableof reducing
contact resistance. A damping hole 9 is formed on the upper pole plate, thereby being capable of reducing damping effect during switching-on and switching-off, simultaneously being conductive to releasing a sacrificial layer 8, ensuring integrity of the structure and preventing the emergence of turnover roll failure when releasing the structure. The
lower pole plate adopts an upper insulating material layer 5 and a lower insulating layer 3 for integral
coating, thereby being capable of effectively preventing the conduction of the upper pole plate and the
lower pole plate after contact and ensuring the upper pole plate and a substrate to be insulated. The MEMS relay is characterized by low driving
voltage and great load current, thereby being widely applied in the fields of
electronic information, industrial control,
energy management, transportation, communication,
aerospace and military.