Metal structure electrostatic-driven MEMS relay and preparation method thereof

Abstract

The invention relates to a metal structure electrostatic-driven MEMS relay and a preparation method thereof, belonging to the technical field of design and manufacture of relays. The metal structure electrostatic-driven MEMS relay is characterized in that the relay is a structure which is fixed and supported at two ends and is divided into an upper active pole plate 7 and a lower fixed pole plate4, the upper active pole plate is referred to as an upper pole plate, the lower fixed pole plate is referred to as a lower pole plate, and the pole plates are both made of metal, thereby being capableof reducing contact resistance. A damping hole 9 is formed on the upper pole plate, thereby being capable of reducing damping effect during switching-on and switching-off, simultaneously being conductive to releasing a sacrificial layer 8, ensuring integrity of the structure and preventing the emergence of turnover roll failure when releasing the structure. The lower pole plate adopts an upper insulating material layer 5 and a lower insulating layer 3 for integral coating, thereby being capable of effectively preventing the conduction of the upper pole plate and the lower pole plate after contact and ensuring the upper pole plate and a substrate to be insulated. The MEMS relay is characterized by low driving voltage and great load current, thereby being widely applied in the fields of electronic information, industrial control, energy management, transportation, communication, aerospace and military.

Description

technical field [0001] The invention belongs to the field of relay manufacturing technology, and in particular relates to a metal structure electrostatically driven MEMS relay with low driving voltage characteristics and high carrying current characteristics and a preparation method thereof. Background technique [0002] The relay is an important control element, which has the functions of isolating input and output circuits, switching signals / loads, and blocking circuits. As a basic electromechanical element, it is widely used in various power protection, energy management instruments and automatic control systems. . Relays of various specifications and types are required to be used in national defense weapons, aerospace and various ground control equipment. This application requires the relay to have high reliability, strong current carrying capacity when closed, small open circuit leakage current, and small contact resistance. Requires small size, light weight, fast resp...

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Problems solved by technology

[0005] 1. The driving voltage required by general MEMS relays is relatively large, which has a certain gap with the standard voltage of 5V on integrated circuits. How to reduce the driving voltage while ensuring a small opening and closing gap is one of the difficult problems in research.

[0006] 2. Due to the small size of the MEMS relay, its heat capacity is small, so generally it cannot load a large current, which limits its application range to a certain extent, so increasing the load current of the MEMS relay is also The focus of the research

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