Ultrasonic detection narrow pulsewidth laser sludge remover and its sludge removing method

Abstract

An ultrasonic detection narrow pulse wide laser cleaner includes a narrow pulse wide laser device (1), a beam adjustment transmission device (2), a moving platform device (3), an ultrasonic detection device (4), an automatic control device (5), a dust absorption recovery device (6) and an ultrasonic detection narrow pulse wide laser filth clearing method. A cleaned object surface is irradiated with narrow pulse wide lasers. And a strong vibration shock wave is produced in short time to remove filths from the medium surface. At the same time, an instrument device is used to monitor and analyze ultrasonic waves caused by the vibration during the cleaning process to ensure the good medium surface and realize the automatic cleaning process. The cleaner is used to remove various filths of oxides, corrosion matters, paint, grease marks, residues, etc. of the media surfaces of metals, semiconductors, buildings, etc. The cleaner has the advantages of good effect, non-damages, high efficiency, automation, etc.

Description

【Technical field】 [0001] The invention belongs to the application field of laser technology, and relates to a method of using the effect of the interaction between a narrow pulse width laser and a substance to remove oxides, rust, paint, oil stains, residues, etc. on the surface of metals, semiconductors, buildings and other media. At the same time, the ultrasonic signal formed by this effect is used to ensure the integrity of the surface of the decontaminated medium, and it can realize an automatic decontamination device and a method for ultrasonic detection of narrow pulse width laser to remove dirt. 【Background technique】 [0002] During the long-term use of any workpiece or substance, some kind of pollutants will be formed on its surface, or some kind of substance will be attached to it. Their existence will bring harm to the normal use of the substance and need to be removed. At present, the means of removing dirt include manual / mechanical friction method, chemical reag...

AI Technical Summary

Problems solved by technology

This not only increases the cost of cleaning, but also limits its scope of use and objects

[0010] At present, laser devices commonly used in laser decontamination devices are mainly continuous CO2 lasers or quasi-continuous Nd: YAG lasers, which use the laser ablation effect mentioned above to remove dirt. The decontamination effect of this type of laser decontamination device Although it is acceptable, due to the ablation effect, the laser energy is generally difficult to control and lacks effective monitoring methods. This will not only fail to improve the cleaning efficiency, but also easily cause the medium itself to be denatured or damaged due to the influence of high temperature.

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