The invention discloses a solar blind
ultraviolet photoelectric
detector based on an amorphous
gallium oxide film and a preparation method thereof, and belongs to the technical field of photoelectricdetectors. The method comprises the steps that the
crystal face (0001) Al2O3 is adopted as a substrate, and the substrate is cleaned; then, the cleaned substrate is fed into a
settling chamber, a
radio frequency magnetic control
sputtering technology is applied to the substrate to grow a
gallium oxide film; finally, a hollow interdigital
mask plate is used for shielding on the amorphous
gallium oxide film, a
direct current magnetic control
sputtering method is adopted for
sputtering an interdigital
metal electrode on the interdigital
mask plate to obtain the solar blind
ultraviolet photoelectric
detector, the structure is an MSM type sandwiched structure, and the Al2O3 substrate, the amorphous
gallium oxide film material and the Ti / Au interdigital
metal electrode are arranged from bottom to top. The
manufacturing technology is simple, the
repeatability is good,
dark current is small, the stability is high, the response speed is high, the
ultraviolet visible restrain ratio is high, andthe
detector conforms to the energy-saving and emission-reducing theory, is suitable for large-scale production, and has the wide development prospect.