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Color filter based on rectangular lattice arrangement and preparation method and application thereof

A technology of color filter and lattice arrangement, which is applied in the field of color filter, can solve the problem that the color response of high saturation cannot be stably realized, and achieve excellent incident angle insensitivity, high saturation, and promote development Effect

Active Publication Date: 2020-04-10
UNIV OF JINAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Further, the inventors found that because it is difficult to achieve precise control of the period during the manufacturing process, the well-designed color filter cannot stably achieve the same high-saturation color response as the design

Method used

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  • Color filter based on rectangular lattice arrangement and preparation method and application thereof
  • Color filter based on rectangular lattice arrangement and preparation method and application thereof
  • Color filter based on rectangular lattice arrangement and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] refer to figure 1 , an example of a color filter based on a rectangular lattice arrangement designed by the present invention, including: a transparent substrate 1, a transparent covering layer 2 and nano-pillars 3; wherein, the material of the transparent substrate 1 is glass; the The material of the transparent covering layer 2 is PMMA; the material of the nano-column array 3 is hydrogenated amorphous silicon.

[0052] The nano-column 3 is cylindrical, its height is between 50-120nm, and its diameter is between 80-140nm, it is fixed on the upper surface of the transparent substrate 1, and the transparent covering layer 2 is filled on the nano-column 3 , and the nano-columns 3 are coated in the transparent covering layer 2; the array formed by the nano-columns 3 is arranged in a rectangular lattice, that is, the lateral period is different from the vertical period, specifically shown as: the distance between adjacent nano-columns A (horizontal period) and the shortest...

Embodiment 2

[0054] 1. Preparation of color filters based on rectangular lattice arrangement, the steps are:

[0055] First, with the help of silane (SiH 4 ) and helium (He) to achieve the deposition of hydrogenated amorphous silicon with a height of 80 nm on a transparent substrate by plasma enhanced chemical vapor deposition (PECVD).

[0056] Subsequently, photoresist nanocolumn arrays with different nanocolumn sizes and periods were formed on the hydrogenated amorphous silicon film by means of electron beam lithography. The diameter / lateral period / vertical period of the photoresist nanocolumn array are 180nm / 370nm / 400nm, 140nm / 260nm / 350nm and 80nm / 150nm / 300nm, respectively, corresponding to the nanocolumn period and diameter of the CMY filter.

[0057] Then, with CHF 3 and SF 6 The mixed gas is dry-etched in the plasma etching machine to etch away the excess hydrogenated amorphous silicon exposed, and the residual photoresist is removed by the oxidizing plasma in the etching machine ...

Embodiment 3

[0065] The method for preparing the color filter in this embodiment is the same as in Example 2, the difference is that the period of the yellow filter of the square and rectangular lattice arrays is increased from 150nm to 300nm; wherein, for the square lattice arrangement, the vertical period and the transverse The periods are increased at the same time and by the same increment. For the arrangement of rectangular lattices, the horizontal (or vertical) period is fixed and only the vertical (or horizontal) period is changed.

[0066] Performance Testing:

[0067] image 3 The transmission spectrum of the yellow filter (Y) based on the square lattice arrangement and the rectangular lattice arrangement prepared in this embodiment varies with the period, from image 3 The change trend of the transmission spectrum shown in the left figure shows that although the resonance wavelength of the yellow filter based on the square lattice arrangement does not change greatly with the ...

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Abstract

The invention relates to the technical field of color filters, in particular to a color filter based on rectangular lattice arrangement and a preparation method and application thereof. The structureof the optical filter comprises a transparent substrate, a transparent covering layer and nanorods. The nanorods are fixed on the surface of the transparent substrate, the transparent covering layer is filled among the nanorods, and the nanorods are coated in the transparent covering layer. The array formed by the nanorods is arranged in a rectangular lattice, and the distance between the adjacentnanorods is not equal to the shortest distance between the two adjacent rows of nanorods. The transverse and longitudinal periods of the metasurface can be independently changed through the rectangular crystal lattices, so that the transmission spectrum and the filtered color are more meticulously regulated and controlled, and finally, the color filter with higher color saturation is obtained. And secondly, by introducing rectangular crystal lattices, namely setting transverse and longitudinal periods of the metasurface to be different values, the structure can show excellent period insensitivity, so that the stability of the color filter is improved.

Description

technical field [0001] The invention relates to the technical field of color filters, in particular to a color filter based on a rectangular lattice arrangement and a preparation method and application thereof. Background technique [0002] The information disclosed in the Background of the Invention is only intended to increase the understanding of the general background of the invention, and is not necessarily to be taken as an acknowledgment or any form of suggestion that the information constitutes the prior art that is already known to those skilled in the art. [0003] A metasurface is an ultrathin two-dimensional optical planar structure composed of densely arranged plasmonic nanostructures or high refractive index nanoparticles. As an alternative to traditional three-dimensional metamaterials, metasurfaces have the advantages of easy fabrication, high compactness, and the ability to integrate with other optical or electronic devices, so they are used in high-resoluti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B1/00
CPCG02B5/20G02B1/005
Inventor 岳文静李阳高嵩张春伟付小倩
Owner UNIV OF JINAN
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