A kind of tft array substrate and its manufacturing method, display panel
An array substrate and substrate technology, which is applied in the field of flat panel display, can solve the problems of poor analysis and experimental analysis, defects of semiconductor layer LCD display bright spots, etc., and achieve the effect of improving quality
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Embodiment 1
[0026] The schematic diagram of the top view structure of the TFT array substrate used for LCD disclosed in Embodiment 1 of the present invention is as follows: Figure 5 said ( Figure 5 only shows the local structure of two adjacent pixels in the TFT array substrate), including: multiple gate lines 201 (only two adjacent gate lines are shown in the figure); multiple common electrode lines 202 (only one common electrode line is shown in the figure); a plurality of data lines 203 (only three adjacent data lines are shown in the figure) that insulate and intersect with the gate line 201; set between the gate line 201 and the data The TFT 204 at the intersection of the lines 203; the pixel electrode 205; the storage electrode 214 and the connection pattern 217. The area surrounded by adjacent gate lines 201 and adjacent data lines 203 is a pixel area, and the pixel area includes a TFT area and a pixel electrode area. The pixel electrode 205 is disposed in the pixel electrode r...
Embodiment 2
[0037] Embodiment 2 of the present invention discloses a manufacturing method of a TFT array substrate. The process flow chart of the TFT array substrate is as follows Figure 9 shown. from Figure 9 It can be seen that the manufacturing process steps of the TFT array substrate disclosed in this embodiment are as follows:
[0038] S1. Provide a substrate 200;
[0039] Wherein, the substrate 200 is usually made of transparent materials such as glass and quartz, or is composed of transparent materials such as glass and quartz and other structures (such as a buffer layer, etc.) thereon.
[0040] S2. Depositing a first conductive layer on the substrate 200, patterning the first conductive layer to form a gate 206, a gate line 201 and a common electrode line 202;
[0041] Among them, the first conductive layer can be made of aluminum, aluminum-molybdenum alloy and other metals, preferably a laminated aluminum metal layer and molybdenum metal layer
[0042] S3 , depositing a fi...
Embodiment 3
[0057] The display panel 10 disclosed in Embodiment 3 of the present invention is as Figure 10 shown. The display panel includes a TFT array substrate 200 and a color filter substrate 300 oppositely arranged, and a liquid crystal layer 400 arranged between the TFT array substrate 200 and the color filter substrate 300 . The TFT array substrate 200 may be the TFT array substrate described in the first embodiment above.
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