Preparation method of zinc phosphide

A technology of zinc phosphide and metal zinc, which is applied in the field of preparation of tetragonal high-purity zinc phosphide, can solve the problems of low yield, complicated preparation process, uneven composition, etc., and achieve the goal of prolonging the reaction time, increasing the reaction temperature and avoiding damage Effect

Inactive Publication Date: 2014-07-30
云南锡业研究院有限公司研究设计院
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Problems solved by technology

However, the traditional zinc phosphide production process has the problems of complex preparation process, low yield and uneven composition, which is not suitable for application in semiconductor electronic materials.

Method used

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  • Preparation method of zinc phosphide
  • Preparation method of zinc phosphide

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Embodiment

[0018] Example: mix metal zinc powder with a purity of 99.9% and analytically pure red phosphorus powder according to the above mass ratio of 3.1 to 3.3:1, put the mixed powder into a high-purity graphite boat, and then put the mixed The high-purity graphite boat of the raw material is put into a vacuum-capable closed heating reactor. Vacuumize the reactor first, then fill the reactor with inert gas to normal pressure, continue vacuuming after the normal pressure, and then fill the reactor with inert gas to normal pressure. Control the reaction temperature to 100-900°C, and the reaction time to 1-8 hours. After the reaction is completed, cool to room temperature and start the furnace to take the material. Use a crusher to crush the preliminarily obtained massive zinc phosphide to obtain tetragonal zinc phosphide products.

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Abstract

The invention relates to a preparation method of zinc phosphide. The invention belongs to a production method of chemical materials and in particular relates to a preparation method of tetragonal system high-purity zinc phosphide. The preparation method of zinc phosphide comprises the following steps: firstly, uniformly mixing metal zinc powder with red phosphorus powder in mass ratio of (3.1-3.3):1, placing mixture into a high-purity graphite boat, then placing the high-purity graphite boat into a smelting furnace while protective gas is introduced until pressure is 90-115KPa, and sealing the smelting furnace; secondly, slowly heating and warming at a speed of 0.5-35 DEG C / min, and carrying out synthetic reaction at the temperature of 100-900 DEG C, so that blocky zinc phosphide is obtained. The zinc phosphide obtained by adopting the preparation method is tetragonal system Zn3P2, product composition phase is uniform, purity is high, flow is short, a production technology is simple, and industrialization can be realized.

Description

technical field [0001] The invention belongs to a method for producing chemical materials, and specifically designs a method for preparing tetragonal high-purity zinc phosphide. Background technique [0002] In industry, zinc phosphide is mainly used for electronic special gas phosphine (PH 3 ), phosphine is an extremely important gas used in the manufacture of semiconductors and LEDs, and has a large domestic demand. In the electronic gas family, silane, phosphine, borane, and phosphine are widely used, and they are extremely important raw materials for the manufacture of IC (abbreviation for integrated circuit, which is an integrated circuit and a general name for semiconductor component products.) Among them, phosphine is an important N-type dopant source in the manufacture of semiconductor devices. At the same time, phosphine is also used in polysilicon chemical vapor deposition, epitaxial GaP materials, ion implantation process, MOCVD process, phosphosilicate glass (PS...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B25/08
Inventor 普友福尹久发武信王友帅陈诚刘柳陈涛郭绍雄何棋马宇李学鹏毛锐董绍尧陈学元朱跃林
Owner 云南锡业研究院有限公司研究设计院
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