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Precision detection method of high-precision angle measurement instrument

A technology of precision detection and angle measurement, applied in the direction of instruments, measuring devices, etc., can solve the problems of inability to coaxially install, unable to achieve high-precision detection, etc., and achieve the effect of feasible precision detection

Active Publication Date: 2014-09-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In order to solve the technical problem that the detection accuracy of the existing high-precision and structurally limited angle measuring instruments depends on the angle reference and cannot achieve high-precision detection, when the angle reference cannot be installed coaxially (high-precision encoder, multi-tooth indexing) In the case of table, polyhedral prism, etc.), the present invention provides a combination of high-precision aiming and standard angles utilizing two plane reflectors and two optical aiming devices (autocollimation light pipe or autocollimation theodolite) , Appropriate, feasible, precision testing method for high-precision angle measuring instruments (and equipment with angle measuring functions)

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Embodiment Construction

[0023] Invention idea of ​​the present invention is:

[0024] The accuracy detection method of the high-precision goniometer of the present invention comprises the following steps: the first plane mirror 4 and the second plane mirror 5 are fixedly installed on the rotating part 1 of the goniometer to be tested, and the two mirror surfaces are adjusted to The rotation axis of the detected goniometer is parallel, and the center normal of the two reflectors passes through the rotation axis. The first self-collimating light pipe 2 is aimed at the second plane reflector 5, and the second self-collimating light pipe 3 is aimed at the first plane. Reflector 4, at this time, the angle between the first self-collimating light pipe 2 and the second self-collimating light pipe 3 is required to be approximately equal to the angle divisible by 360°, which is the angle of the reference angle. Turn the detected goniometer counterclockwise at an angle approximately equal to the reference angl...

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Abstract

The present invention relates to a precision detection method of a high-precision angle measurement instrument. The method comprises the steps of rotating a rotating part of the detected angle measurement instrument to a position at which a second auto-collimation light pipe aims at a reflection surface of a first plane mirror, and recording an output angle value of the detected angle measurement instrument at the moment; moving a first auto-collimation light pipe to aim at the reflection surface of a second plane mirror; continuously rotating the detected angle measurement instrument to the position at which the first auto-collimation light pipe aims at the reflection surface of the first plane mirror in the same direction, and recording the output angle value of the detected angle measurement instrument at the moment; moving the second auto-collimation light pipe to aim at the reflection surface of the second plane mirror; repeating the above measurement until the integer cycle measurement is finished; and obtaining the precision of the detected angle measurement instrument according to an error between a rotation angle value and a standard angle of the output angle recording of the detected angle measurement instrument. By the precision detection method of the present invention, and by utilizing high-precision aiming and standard angle combination, the precision of the high-precision angle measurement instrument can be detected appropriately and feasibly.

Description

technical field [0001] The invention belongs to the technical field of angle detection of precision instruments, and in particular relates to a precision detection method of a high-precision angle measuring instrument. Background technique [0002] Due to the development of precision angle measuring instruments, the requirements for the accuracy of angle measurement are getting higher and higher, and the traditional detection method of angle measurement accuracy can no longer meet the actual engineering needs. Traditional angle measurement accuracy detection generally adopts the comparison method. A simple structure is to install a high-precision reference element coaxially with the angle measurement instrument as the angle reference, such as high-precision encoders, multi-tooth indexing tables, polyhedral prisms, etc. , the angle reference accuracy is required to be 3 to 4 times higher than the measured instrument, and the angle measurement accuracy can be obtained by obtai...

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Application Information

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IPC IPC(8): G01B21/22
Inventor 艾华曹艳波
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI