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MEMS switch

A micro-electromechanical system and switch technology, applied in the direction of circuits, relays, electrical components, etc., can solve the problems of not being able to guarantee good contact and the effect discount of the number of contact points, so as to improve power capacity and reliability, and increase power capacity , Improve the effect of switching power capacity and reliability

Active Publication Date: 2016-04-20
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The most direct way to solve the problem of thermal failure of contact points is to increase the number of contact points. However, in the RF microwave frequency band, as the frequency increases, the skin effect of the current will become more and more obvious, making the current concentrated on the peripheral contact points. The effect of increasing the number of touch points will be greatly reduced
In addition, the cantilever beam cannot guarantee good contact with every contact point when the switch is closed and

Method used

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Embodiment Construction

[0022] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0023] figure 1 is a structural block diagram of a MEMS switch according to an embodiment of the present invention. Such as figure 1 As shown, the MEMS switch of the embodiment of the present invention includes: a substrate 100 , a microwave transmission line 200 , a multi-channel strip plate 300 , a signal power distribution transition region 400 and a driving electrode 500 .

[0024] Wherein, the microwave transmission line 200 is disposed on the substrate 100 . One end of the multi-channel strip plate 300 is fixed on the ba...

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Abstract

The invention provides a micro electro mechanical system switch. The switch comprises a base, a microwave transmission line arranged on the base, a multi-channel bar-shaped polar plate, a signal power distribution transition area and a drive electrode, wherein one end of the multi-channel bar-shaped polar plate is fixedly arranged on the base; the signal power distribution transition area is connected with the fixed end of the multi-channel bar-shaped polar plate and is used for achieving power distribution of the multi-channel bar-shaped polar plate; the drive electrode is arranged on the base and located under the multi-channel bar-shaped polar plate and drives the multi-channel bar-shaped polar plate to bend when powered on so that the multi-channel bar-shaped polar plate can be contact with the microwave transmission line to form an access. The micro electro mechanical system switch is large in power capacity, high in reliability and simple in structure.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a micro-electro-mechanical system switch. Background technique [0002] A microelectromechanical system (MEMS) switch is a radio frequency switch made using MEMS technology, which controls the on and off of radio frequency signals through the movement of micromechanical structures. Compared with traditional PIN and FET microwave switch devices, RF MEMS switches not only have excellent microwave performance such as high isolation, low loss, high linearity, low power consumption, and broadband, but also have mass production, small size, The feature of being easy to integrate with advanced microwave radio frequency circuits is the key technology to realize miniaturized, low-cost, high-performance microwave transceiver front-end systems, and has a wide range of applications in satellite communications, radar, automobiles, instruments and other fields. Howeve...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01H59/00
Inventor 刘泽文龚著浩郭昕
Owner TSINGHUA UNIV