A three-degree-of-freedom precision positioning platform with large travel plane based on compliant mechanism
A compliant mechanism and precise positioning technology, applied in the machine/stand, supporting machine, mechanical equipment, etc., can solve the problems of low resolution, low output force, stroke limitation, etc., to achieve high resolution, fast response, precision high effect
Active Publication Date: 2016-06-29
SOUTH CHINA UNIV OF TECH
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Problems solved by technology
The former can achieve high resolution, but the stroke is limited by the driver (generally only tens of microns); the latter can achieve large stroke, but the resolution is low and the output force is not high
Method used
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[0029] Such as Figures 1 to 3 shown. The present invention is a large-stroke planar three-degree-of-freedom precision positioning platform based on a compliant mechanism, including a fixed platform 9, a moving platform 6 placed on the fixed platform 9, and a transmission mechanism for driving the movement of the moving platform 6; the fixed platform Gasket 8 is arranged at the junction of 9 and moving platform 6, so that the two keep a certain gap. The fixed platform 9 is located on the same vertical line as the center of the moving platform 6 .
[0030] The transmission mechanism includes three parallel two-stage lever-type amplifying mechanisms, which are distributed around the moving platform 6 at an angle of 120° along the center of the fixed platform 9, and the shape depends on the distribution of the stress it bears during the force transmission process.
[0031] Among the three parallel two-stage lever-type amplifying mechanisms, each two-stage lever-type amplifying ...
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The invention discloses a large-stroke plane three-degree-of-freedom precision positioning platform based on a compliant mechanism, which includes a fixed platform, a moving platform placed on the fixed platform, and a transmission mechanism for driving the movement of the moving platform. The transmission mechanism includes three parallel The two-stage lever type amplification mechanism is distributed around the moving platform at an angle of 120° along the center of the fixed platform. The movement is transmitted through a two-stage lever-type amplification mechanism, which realizes the advantages of large stroke, high precision and fast response of the moving platform, and effectively expands the working space of the moving platform. The detachable connection components can quickly replace the moving platform, design a specific structure of the moving platform according to the needs of the actual positioning space, and design a specific bottom fixed platform to combine with it. The flexible hinge is used as the rotating pair to ensure no gap, no friction, no lubrication, high precision and high stability of motion transmission. It can be widely used in precision positioning, precision and ultra-precision machining, precision operation, precision measurement and micro-electromechanical systems and other related fields.
Description
technical field [0001] The invention relates to a plane three-degree-of-freedom precision positioning platform, in particular to a large-stroke plane three-degree-of-freedom precision positioning platform based on a compliant mechanism. Background technique [0002] The precision positioning platform is a key part of micro-nano operation, micro-nano measurement and micro-nano manufacturing technologies, and plays an important role in precision and ultra-precision machining, precision operation, precision measurement and micro-electromechanical systems and other related fields. Traditional precision positioning platforms are generally driven by motors and driven by precision ball screws. The positioning accuracy and repeat positioning accuracy are severely restricted by nonlinear factors such as clearance and friction. The compliant mechanism relies on the elastic deformation of the flexible hinge to realize the main movement and function of the mechanism, which ensures no ga...
Claims
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IPC IPC(8): G12B5/00F16M11/12F16M11/18
CPCG03F7/70725G03F7/70716H01L21/68707
Inventor 张宪民王瑞洲
Owner SOUTH CHINA UNIV OF TECH