Nozzle tip

Abstract

Disclosed herein is a nozzle tip coupled to a nozzle header so that washing water is sprayed toward a substrate during a process of washing the substrate, the nozzle tip including: a flange having a hollow part formed therein; and a pipe body having a discharging slit formed in a front end portion thereof so as to be communicated with the hollow part of the flange.

Description

[0001] Cross-references to related applications [0002] This application claims the benefit of foreign priority to Korean Patent Application Serial No. 10-2013-0095412, filed Aug. 12, 2013, entitled "Nozzle Tip," which is hereby incorporated by reference in its entirety in In this application. technical field [0003] The present invention relates to a nozzle port, and more particularly, to a nozzle port that sprays wash water toward a surface of a substrate during a process of washing the substrate. Background technique [0004] Generally, for the processes of washing and etching a substrate, various foreign substances smeared on the surface of the substrate are removed by mist sprayed from a two-fluid nozzle. [0005] That is, water and air are introduced into the two-fluid nozzle and then atomized so that the two-fluid nozzle sprays mist, which is a mixture of atomized water and air, toward the surface of the substrate at a predetermined angle. [0006] The above-menti...

AI Technical Summary

Problems solved by technology

[0008] However, in the case where the spray angle needs to be adjusted during mist spraying, the two-fluid nozzle according to the prior art is inconvenient because in order to use the two-fluid nozzle, it is first necessary to connect the spray angle adjusting member to the two-fluid nozzle. separate, and then insert another spray angle adjustment member into the two-fluid nozzle

[0009] Specifically, during the process of replacing the spray angle adjusting member, after the spray angle adjusting member is forced to be separated from the two-fluid nozzle, the spray angle adjusting member may be replaced, so that operability may be reduced

[0010] In addition, because the two-fluid nozzle has a large number of parts, the nozzle also has a large amount of assembly and handling, and in the case where the internal structure of the two-fluid nozzle, the straight fluid path portion and the streamline fluid path portion in its fluid path are connected to each other , will significantly reduce the processability

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