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Production support system and production support method
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A support system and production number technology, applied in the direction of manufacturing calculation system, general control system, control/adjustment system, etc., can solve the problem of large deviation of final product quality
Active Publication Date: 2015-03-25
KK TOSHIBA
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[0007] Therefore, in the case of a small production quantity (such as the start of mass production of new products accompanied by product replacement, when the production of old products is reduced due to product replacement, etc.), the deviation of the final quality of the product may be reversed. will get bigger
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no. 1 approach
[0016] figure 1 It is a block diagram for exemplifying the production support system according to the first embodiment.
[0017] Such as figure 1 As shown, the production support system 100 is provided with: an input unit 1, a production information storage unit 2a, a manufacturing equipment information storage unit 2b, an inspection and measurement equipment information storage unit 2c, a scheduled batch number calculation unit 3, and a final quality information storage unit. 4. A control mode computing unit 5 (corresponding to an example of a first control mode computing unit), a management information computing unit 6 , and an output unit 7 .
[0018] The input unit 1 is used to input data for specifying a target product and data related to constraint conditions.
[0019] The data for specifying the target product include, for example, a product, a process, a target period, process conditions, and the like.
[0020] The data related to the constraints will be described l...
no. 2 approach
[0084] image 3 It is a block diagram for exemplifying the production support system according to the second embodiment.
[0085] Such as image 3 As shown, the production support system 101 is provided with: an input unit 11, a production information storage unit 2a, a manufacturing equipment information storage unit 2b, an inspection and measurement equipment information storage unit 2c, a scheduled batch number calculation unit 3, an inspection and measurement information Storage unit 12a, APC information storage unit 12b, control mode calculation unit 14 (corresponding to an example of the second control mode calculation unit), output unit 7, first auxiliary unit 15a, second auxiliary unit 15b, third auxiliary unit 15c, And the fourth auxiliary part 15d.
[0086] The input unit 11 can be the same as the above-mentioned input unit 1 .
[0087] However, the input unit 11 also has a switch for selecting any one of the first auxiliary unit 15a, the second auxiliary unit 15b...
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Abstract
The embodiment relates to a production support system and a production support method. The production support system includes: a production information storage unit; a manufacturing apparatus information storage unit; an inspection / measurement apparatus information storage unit; a planned lot number calculation unit; and a first control mode calculation unit. The first control mode calculation unit is configured to calculate an appropriate control mode from the number of products to be subjected to the control of the final quality, a relationship between fluctuation of the final quality and a number of products when performing a predetermined feedback type / feedforward type combined APC, fluctuation of the final quality when performing a feedforward type APC, and fluctuation of the final quality when not performing the feedback type / feedforward type combined APC.
Description
[0001] References to Related Applications: This application enjoys the benefit of priority of Japanese Patent Application No. 2013-194715 filed on September 19, 2013, and the entire content of the Japanese Patent Application is cited in this application. technical field [0002] The embodiments described here generally relate to a production support system and a production support method. Background technique [0003] In recent years, the management of final quality of products has become more and more stringent. For example, in the manufacture of electronic devices such as semiconductor devices, along with the advancement of miniaturization, the management of dimensions after processing has become very strict. [0004] Here, APC (Advanced Process Control: Advanced Process Control) is known as a technique for controlling the final quality of products in the mass production stage. [0005] If the operating conditions of the manufacturing equipment are adjusted through APC, t...
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