31 results about "Advanced process control" patented technology

An enterprise engineering and configuration system includes a common configuration database and support services stored in and executed in a compute fabric of an enterprise. The configuration database and support services use and implement a common configuration data schema to support the configuration of hardware and software in the compute fabric and at multiple different sites or physical locations of the enterprise even when different control and automation systems are used at these different sites or physical locations. The configuration system enables implementing hardware or software configuration changes to various different sites or locations of an enterprise either centrally from a configuration device connected directly to the compute fabric of the enterprise or locally from any physical location or site of the enterprise, while maintaining a single integrated enterprise configuration database that stores configuration data for each of the multiple sites of the enterprise. This configuration system is flexible as it enables engineering and configuration changes to be made by users anywhere in the enterprise for any of the sites of the enterprise and across different sites of the enterprise.

The invention relates to the technical field of industrial data acquisition and advanced process control, and discloses an intelligent temperature control method for an oligomeric anti-swelling ammonium salt preparation reaction process. The method comprises the following steps: identifying a reaction stage switching critical window based on a multi-point temperature field and thermodynamic parameters; a fifth-order polynomial nonlinear temperature setting track with continuous first-order and second-order derivatives is generated in the window; in combination with multi-area temperature measurement weighted average feedback and reaction heat release rate feedforward, the jacket medium flow is dynamically adjusted through feedforward-feedback compound control. The system comprises a multi-source data acquisition unit, a stage judgment unit, a track generation unit, a feedback control unit, a feed-forward compensation unit and an execution driving unit. The thermal disturbance is effectively inhibited, the standard deviation of molecular weight distribution of the product is reduced by more than 40%, and the batch consistency is remarkably improved.

The embodiment of the invention provides a winter construction reinforced concrete electromagnetic curing method and system based on a layered progressive mathematical control framework, and belongs to the technical field of crossing of intelligent construction, advanced process control and computational mathematics. The method comprises the following steps: acquiring temperature, hydration degree and environmental parameters in real time, performing space-time fusion with electromagnetic heating input, constructing a maintenance state feature vector, establishing a parameterized grey box prediction model based on a multi-physics coupling mechanism, and realizing online joint estimation of state and model parameters by combining Bayesian inference and unscented Kalman filtering. On this basis, distributed robust model predictive control is introduced, modeling is carried out on external disturbance uncertainty, an optimal heating strategy is generated, finally, execution of all heating subareas is coordinated through a distributed cooperative control algorithm, global optimization of the maintenance process is achieved, the temperature difference risk in winter construction is effectively reduced, and the maintenance efficiency is improved. The maintenance energy efficiency and the system operation stability are improved.

The invention discloses a cooperative control method and device for multiple fluidized bed boilers and a medium, and is applied to the field of advanced process control. The method comprises the following steps: acquiring a pressure change rate corresponding to a mother pipe pressure signal; determining a load adjusting instruction corresponding to the boiler according to the pressure change rate and the absolute value, and determining a corresponding load adjusting quantity according to the pressure change rate and boiler performance parameters corresponding to the boiler; and if the absolute value of the second derivative of the pressure change rate is not smaller than a decoupling threshold value in the process that the boiler carries out load adjustment according to the load adjustment instruction and the load adjustment quantity, corresponding air-coal decoupling compensation operation is determined according to the second derivative of the pressure change rate, and cooperative control is carried out based on the air-coal decoupling compensation operation and load adjustment. According to the method, the mother pipe pressure signal belongs to a feedforward signal in the boiler operation process, and compared with post feedback, the response speed is increased, and the response precision is improved. And the air-coal decoupling compensation operation and the load regulation are cooperatively controlled, so that the quality, the safety and the economy are improved.

A method for forming a semiconductor structure includes: providing a substrate, the substrate including a base and a layer to be etched, the substrate including a first region and a second region; forming a plurality of first initial mask structures on the first region, and forming a plurality of second mask structures on the second region, the initial first mask structures having a first width deviation dimension, and the second mask structures having a second width deviation dimension; forming a first sacrificial layer on the layer to be etched and the second mask structures; and etching the first initial mask structures to form a first mask structure based on a first advanced process control technology, the first mask structure having a second width dimension and a third width deviation dimension, wherein the third width deviation dimension is equal to the second width deviation dimension. By using the first advanced process control technology for algorithm optimization, the third width deviation dimension is made equal to the second width deviation dimension, eliminating the process step of forming an additional sacrificial layer and then covering the first mask structure.

The invention discloses an advanced process control system, method and equipment for semiconductor manufacturing and a medium. The system adopts a modular architecture, and aims to improve the flexibility of advanced process control in a complex production scene. The system comprises a plurality of core modules; a request receiving module is responsible for receiving a process parameter adjustment request; the protocol analysis module converts the request into an internal protocol; the workflow preprocessing module carries out data preprocessing and integrates contextual information such as equipment states and production batches. And the rule engine module executes logic judgment through configurable rule searching, rule execution and script plug-in units of the rule engine module. The workflow judgment module determines whether the workflow ends or not according to a preset process parameter threshold value or a time threshold value. The result aggregation module and the response return module finally return the processing result to the equipment automation program (EAP). According to the system, through modular design and integration of an intelligent rule engine, the ability of the workflow to deal with complex production conditions is effectively enhanced.

Various embodiments described herein relate to systems and methods for testing Advanced Process Control (APC) strategies in a facility. In this regard, snapshots of a model predictive controller which is under operation in the facility is captured. Using the snapshots, a digital twin of a process unit is initialized. Then, a tuning overlay is rendered via a user interface. Further, inputs from a user via the user interface is received for fields in the tuning overlay. The inputs are associated with at least one APC strategy that is to be tested for the process unit. Based on the inputs, the at least one APC strategy is tested using the digital twin of the process unit. In response to the testing, results for the at least one APC strategy are rendered on the user interface. Also, based on the results, at least one operation of the process unit is modified.

The application discloses a sewage pool temperature self-adaptive control method and system and a medium, and belongs to the technical field of advanced process control, and comprises the following steps: collecting sewage pool basic data, forming a basic fluctuation amount, and obtaining a response delay time; determining an effective response window; generating a sample admission result; calculating and updating a temperature response coefficient in a corresponding direction; generating and issuing next-period temperature regulation execution parameters and next-period mixing execution parameters. The application generates a sample admission result in the effective response window, and only updates the temperature response coefficient according to the admitted sample, so that the accurate identification of the real temperature response change caused by the heat exchange action, the reliable update of the temperature response coefficient and the stable generation of the next-period control action are achieved, and the problems that the sewage pool temperature change is not clearly attributed in the prior art, the subsequent control parameters are incorrectly corrected, and the temperature regulation is delayed or the energy consumption is abnormally increased are solved.

The invention provides an advanced process control application feasibility analysis method, related equipment and a storage medium, and is applied to the technical field of automatic control. Respectively determining a first average value and a first standard deviation of the target system variables according to the obtained historical data, predicting a target average value of the key variables after advanced process control is applied according to the first average value and the first standard deviation of the target system variables, and finally determining the target average value of the key variables based on the target average value and the first average value of the key variables. According to the method, the analysis indexes used for representing the application feasibility of the advanced process control are determined, the corresponding analysis indexes are provided before the advanced process control is actually applied, a basis can be provided for enterprise decision making, and a standard can be provided for effect evaluation after project implementation.

The invention provides an advanced process control system and method, and the method comprises the steps: recording the batch number of an uncompleted Nth film layer if a baseline is changed, and recording the batch number of an uncompleted first film layer from the Nth film layer; updating the group corresponding to the first film layer by using the changed base line, and distributing the batch of the first film layer which is not changed in time to a new group by using analog data of the new group as feedback information or feedforward information; in the batch of which the Nth film layer is not completed, judging whether the production condition of the film layer aligned with the second film layer to the Nth film layer is a new base line or an original base line so as to judge whether the production condition of the second film layer to the Nth film layer is the new base line or the original base line, and if part of the batch of which the Nth film layer is not completed in any film layer is the new base line, judging whether the production condition of the film layer aligned with the second film layer to the Nth film layer is the original base line; a part of the batch of which the Nth film layer is not completed is the original base line, the batch corresponding to the new base line and the batch corresponding to the original base line cannot be divided into the same group, and if the new base line and the original base line exist in the same batch in any film layer, the batch of wafers are reserved at the current station.

The invention relates to the technical field of power electronics and automatic control, discloses an intelligent control optimization method and system for a frequency converter, and aims to solve the problems that an existing frequency converter control strategy depends on a fixed model, is poor in adaptability, lacks online learning ability and is insufficient in multi-target collaborative optimization. The method comprises the following steps: acquiring a multi-source operation signal of the frequency converter in real time, and carrying out denoising and normalization processing; extracting a working condition vector containing steady-state deviation, dynamic fluctuation and load change characteristics; a system on-line identification model is constructed by using a gating cycle unit (GRU) network, and real-time prediction of dynamic characteristics is realized. According to the invention, through integration of advanced process control and machine intelligence, adaptive adjustment of complex working conditions is realized, control precision, response speed and energy efficiency level are significantly improved, strategy autonomous evolution is supported, maintenance cost is reduced, and stable operation of the system is guaranteed.

Embodiments of the present disclosure provide improved asset monitoring. A set of one or more performance indicators for an asset is identified. A set of one or more weighted performance indicator scores corresponding to the set of one or more performance indicators is generated. A performance health score for the asset is generated for the asset based on the set of one or more performance indicators and uptime data by aggregating the set of one or more performance indicators with respect to the uptime data. Performance of one or more prediction-based actions based on the performance health score.

A method for forming a semiconductor structure includes: providing a substrate, the substrate including a base and a layer to be etched, the layer to be etched including a first region and a second region, the first region having a plurality of first initial mask structures thereon, and the second region having a plurality of second mask structures thereon; forming a sacrificial layer on the second region; performing etching processing on the first initial mask structures to form first mask structures; forming a protective layer on sidewalls and top surfaces of the first mask structures and on sidewalls and top surfaces of the second mask structures based on a first advanced process control technology; and etching the layer to be etched to form a plurality of patterned structures on the base. The first advanced process control technology can compensate feature sizes of the first mask structures and the second mask structures at the same time, and thus the feature sizes of the second mask structures also conform to preset feature sizes, thereby ensuring accuracy of subsequent pattern transfer and improving wafer production yield and reliability.

The invention relates to the technical field of advanced process control and industrial data acquisition, and discloses an online friction resistance test-based intelligent production method of an acid solution thickening agent, which comprises the following steps of: acquiring a pressure drop signal in real time through an online friction resistance sensing unit, calculating a friction resistance coefficient sequence by combining temperature and flow velocity, and extracting time-frequency characteristics through multi-scale wavelet decomposition; fusing the initial formula parameters, inputting a pre-trained crosslinking degree-friction coupling neural network model, and outputting an equivalent crosslinking density estimated value; based on the deviation, a model prediction control algorithm is adopted to generate a proportion correction instruction, and the raw material feeding flow is dynamically adjusted. According to the method, a static threshold judgment mode for friction data in a traditional intelligent production system is abandoned, and a dynamic physical-data hybrid model between a friction signal and a thickening agent molecule cross-linked network is established for the first time. Fluid micro-disturbance is captured by an online friction sensing unit at a kilohertz-level sampling frequency, and molecule entanglement and crosslinking state information contained in the fluid micro-disturbance is analyzed and extracted in combination with multi-scale wavelets.

The invention provides an intelligent gypsum oxidation and dehydration comprehensive process optimization method for wet desulphurization. The method comprises the following steps: installing a sulfite and gypsum moisture content online detector in a desulphurization system to construct an intelligent sensing system; an oxidation air utilization rate model is established, and the oxidation air volume is dynamically calculated and adjusted in a variable frequency mode according to the SO2 removal amount; establishing a dehydration operation control model, and dynamically adjusting parameters such as vacuum degree and filter cake thickness; constructing an oxidation-dehydration coupling model to realize system collaborative optimization; and finally, advanced process control is implemented through integration of the intelligent environment-friendly island digital intelligent platform. According to the method, the remarkable energy-saving effect that the electricity-saving rate of the oxidation fan exceeds 20% and the electricity-saving rate of the vacuum pump reaches 35% is achieved, the water content of gypsum is stably controlled to be 9.5% or below, the problems that a traditional process is high in energy consumption, unstable in operation and lack of collaborative optimization are effectively solved, and the method has both environmental protection and economic benefits.

The present disclosure relates to a method of enhancing an operation of a process plant. The method comprises configuring a primary controller to be connected to one or more secondary controllers via conjoint variables and sending at least one optimization call to the one or more secondary controllers, where the conjoint variables in the primary controller has a PWO limit and conjoint variables in the one or more secondary controllers has an advanced process control (APC) limit. A proxy limit is received from the one or more secondary controllers in response to the at least one optimization call and the APC limit and received proxy limit is analysed to determine an optimal target. The optimal target is sent to the one or more secondary controllers, which are instructed to adjust the APC limit to the optimal target.

The invention relates to the field of thermal power plant intelligent control, and provides a thermal power generating unit depth peak regulation coordination method and system, and the method comprises the steps: collecting a video data stream and a broadband sound wave signal, and generating a high-dimensional time sequence data frame sequence through the alignment of acoustic atom dictionary timestamps; extracting visual and acoustic feature embedding vectors, constructing a heterogeneous dynamic graph, and analyzing spatio-temporal evolution to generate a future combustion instability index; an unstable mode code and a future risk index are generated based on an expert rule base, an enhanced state vector is constructed by fusing real-time macroscopic state parameters, and an optimal control instruction set is generated by an intelligent agent through optimization under dynamic constraint; the instruction set is decoded into a control signal sequence through multiple safety verification, a risk index difference value before and after intervention is compared to generate a validity evaluation index, and the validity evaluation index is packaged into an experience playback tuple to update agent parameters. According to the method, multi-mode space-time prediction and self-adaptive control are fused, a combustion instability precursor prediction and look-ahead control closed loop is constructed, and the method is suitable for intelligent monitoring and advanced process control of a thermal power plant.

The application discloses a kind of multi-flow fluidized bed boiler collaborative control method, equipment and medium, applied to advanced process control field.The method comprises: obtaining the pressure change rate corresponding to mother pipe pressure signal;According to the size and absolute value of pressure change rate, determine the load adjustment instruction corresponding to boiler, and according to pressure change rate and the load adjustment amount corresponding to the furnace nature parameter of boiler;If in the process that boiler carries out load adjustment according to load adjustment instruction and load adjustment amount, the absolute value of the second derivative of pressure change rate is not less than decoupling threshold, then according to the second derivative of pressure change rate, determine the corresponding wind coal decoupling compensation operation, and based on wind coal decoupling compensation operation and load adjustment collaborative control.The method in this method, mother pipe pressure signal is in boiler operation belongs to feedforward signal, compared with "after the fact" feedback, improve response speed and accuracy.And wind coal decoupling compensation operation and load adjustment collaborative control, improve quality and safety economy.

The application discloses a tunnel collapse collaborative treatment system and method based on a twin model prediction, and belongs to the technical field of underground engineering disaster prevention and treatment. The system comprises a multi-source fusion intelligent perception layer, a digital twin analysis and decision-making layer and a distributed collaborative execution layer. The perception layer collects data in real time; the decision-making layer constructs a dynamic digital twin and runs a model prediction control algorithm, performs simulation prediction and rolling optimization, and generates collaborative control instructions; and each terminal of the execution layer receives the instructions and collaborates. Through the "perception-simulation-prediction-execution" closed loop, the digital twin and advanced process control theory are deeply integrated, the problems of traditional treatment measures, such as dispersion, poor collaboration and decision lag, are solved, advanced simulation, dynamic optimization and adaptive collaborative control of the collapse treatment process are realized, and the safety, efficiency and structural reliability are significantly improved.

The present application relates to the technical field of program control, and discloses an advanced process control method for disaster area unmanned aerial vehicle light source cooperative lighting. In view of the light intensity superposition distortion problem in the light field overlapping area of multiple machines, the unmanned aerial vehicle pose change sequence and the light source optical axis pointing angle change sequence under strong wind load are obtained, and a multivariate non-minimum phase transfer function matrix is constructed with the pose change as input and the ground grid node light intensity change as output. A diagonal matrix decoupling compensator is introduced to decouple the above-mentioned predicted output vector into independent single variable channels, and the compensation angular velocity control sequence of the light source holder is solved by optimizing the target of approximating the preset light intensity value with the predicted value. The sequence is reversely superimposed with the bottom attitude angular velocity to drive the holder to execute compensation. The scheme cuts off the cross-coupling path of the pose disturbance and the adjacent light beams, eliminates the light intensity flicker and overexposure in the overlapping area, and maintains the static consistency of the light distribution on the rescue operation surface.

Embodiments of the present disclosure relate improved asset performance monitoring and plantwide optimization improvement. Performance data for a set of assets may be generated by performing analytics on plant data associated with the set of assets. The set of assets may include at least a plantwide optimizer (PWO) controller and one or more advanced process control (APC) controllers associated with the PWO controller. A first performance metric for the PWO controller that fails to satisfy a first performance threshold may be identified by comparing the performance data to one or more PWO performance thresholds. Performance insight data may be generated in response to identifying the first performance metric at least in part by applying the performance data to one or more analytical models comprising one more asset performance dependency graphs. Performance of one or more plantwide optimization implementation actions may be initiated based on the performance insight data.

The application discloses an APC-steam temperature and pressure compensation method, system, device and medium, and is applied to the field of process control. The APC-steam temperature and pressure compensation method provided by the application combines advanced process control and temperature and pressure compensation, respectively acquires a steam flow control value and a steam flow compensation value according to a liquid level in a fractionating tower, steam parameters and steam standard parameters in the fractionating tower in real time, and determines a steam flow regulation value together, so that the steam flow of the fractionating tower is automatically regulated in real time. The method not only avoids frequent manual regulation, but also avoids the phenomenon of control hysteresis caused by manual regulation after the liquid level fluctuation is found, realizes the regulation measure before the liquid level fluctuation occurs, and thus avoids the system fluctuation. The APC-steam temperature and pressure compensation system, device and medium provided by the application have the same beneficial effects.

The utility model discloses an intelligent rectification system for thionyl chloride production, which relates to the technical field of thionyl chloride production and comprises a rectification tower, the rectification tower is connected with a feeding tank, a condenser, a reflux tank and a reboiler, and control valve groups are arranged on the rectification tower, the feeding tank, the condenser, the reflux tank and the reboiler. Liquid level monitoring assemblies and flow monitoring assemblies are arranged on the rectifying tower, the feeding tank and the return tank, temperature monitoring assemblies are arranged on the rectifying tower, the condenser and the reboiler, and pressure monitoring assemblies are arranged on the rectifying tower and the reboiler; the control valve set, the liquid level monitoring assembly, the flow monitoring assembly, the temperature monitoring assembly and the pressure monitoring assembly are all electrically connected with an advanced process control system. The intelligent rectification system for thionyl chloride production can solve the problems that an existing rectification system is low in automatic control rate, unstable in parameter, poor in separation effect and high in energy consumption.

The application discloses a kind of advanced process control systems, methods, equipment and media for semiconductor manufacturing.The system uses modular architecture, aims to improve the flexibility of advanced process control in complex production scenarios.The system includes multiple core modules: request receiving module is responsible for receiving process parameter adjustment request;Protocol analysis module converts request into internal protocol;Workflow preprocessing module carries out data preprocessing and integrates device state, production batch and other context information.Rule engine module executes logical judgment through its configurable rule search, rule execution and script plug-in unit.Workflow judgment module determines whether the workflow is ended according to the preset process parameter threshold or time threshold.Result aggregation module and response return module finally return the processing result to equipment automation program (EAP).The system effectively enhances the ability of workflow to cope with complex production conditions through modular design and integration of intelligent rule engine.

The invention relates to the field of oxygen production, in particular to a design method of an oxygen production intelligent control operation system, which comprises the following steps: designing a main tower advanced controller; designing an argon tower advanced controller: establishing a control model relationship between a liquid air throttle valve and crude argon tower resistance and a crude argon fraction circulation volume, and establishing a control model relationship between a process argon to pure argon tower regulating valve and a pure argon tower cold source regulating valve and oxygen purity in argon, process argon flow and nitrogen in argon; a controller model is established according to operator experience, historical data, controller debugging and artificial experience. By designing an advanced process control system, full-automatic load changing and economic optimization are achieved, manpower resources are liberated, and the operation process is standardized.

The invention discloses a multivariable predictive control method and a related device, belongs to the field of advanced process control, and is applied to a multivariable predictive control system comprising a simulation controller, a real controller, a hybrid predictive model and a real control object. A simulation control input variable is determined by a prediction output variable of a current control period of a real controller determined by a previous prediction period and a current real control parameter of the real controller, and a prediction sub-model matched with the simulation control input variable in a hybrid prediction model is used for prediction. And obtaining a predicted output variable of the next control period of the real controller. The prediction result of the previous prediction period of the hybrid prediction model and the real control parameters of the real controller jointly participate in prediction of the prediction output variable of the next control period, and compared with a mode of performing variable prediction only by analyzing historical data in the prior art, the prediction precision is improved.

The invention relates to the field of biomedical engineering, discloses an acousto-optic-electric intelligent treatment regulation and control method and system, and aims to solve the problems of static parameters, simple coordination mechanism, lack of real-time feedback and insufficient individuation in existing acousto-optic-electric treatment regulation and control. The method comprises the following steps: synchronously acquiring multi-modal physiological signals and environmental parameters in real time, and constructing a dynamic physiological state vector; performing feature extraction and fusion on the data through a deep sequential network model, establishing a quantitative model of a current physiological state, and predicting a future physiological state evolution trajectory; based on the model and a preset treatment objective function, an optimal sound, light and electricity collaborative stimulation instruction is generated through a model prediction control algorithm, machine intelligence and advanced process control are combined, accurate perception and prediction of the individual physiological state are achieved, a multi-mode stimulation collaborative strategy is dynamically optimized, and the physical therapy effect is improved. And the individuation, the safety and the overall efficiency of treatment are improved.

The invention provides a load coordinated regulation method and system for a methanol synthesis-rectification integrated system, and the method comprises the steps: integrating a plurality of manipulated variables and a plurality of controlled variables of a methanol synthesis side and a methanol rectification side into a multivariable prediction model through an advanced process control APC framework; in response to upstream load change caused by fresh air flow disturbance, synchronously calculating adjustment amounts of a plurality of controlled variables on a methanol synthesis side and a rectification side through a multivariable prediction model by a feedforward and feedback composite algorithm; adjusting the corresponding manipulated variable according to the adjustment amount, and automatically increasing and decreasing the load of the methanol synthesis side and the rectification side; and through a dynamic constraint mechanism for automatically switching the priorities of the hard constraint and the soft constraint, the adjustment process of the plurality of controlled variables is constrained. According to the method, advanced process control APC is taken as a core, global synergy and grading optimization are carried out on a methanol synthesis side and a rectification side, and closed-loop automatic adjustment integrating synthesis load, rectification load and product quality can be realized.

According to the automatic dispatching system and the automatic dispatching method provided by the invention, before an appointment stage of dispatching the current wafer goods batch by a real-time dispatching system, whether each wafer goods batch to be dispatched can run on a corresponding machine table or not can be pre-checked through an advanced process control system; the problem that the wafer goods batches are locked by the machine table in the station entering stage of the real-time dispatching system for dispatching the wafer goods batches is avoided, then the situation that the wafer goods batches are manually unlocked is avoided, and meanwhile the problem that the wafer goods batches and the machine table which cannot support goods running of the wafer goods batches are subjected to relation binding in the queue adding stage of the real-time dispatching system can be avoided; compared with the prior art, the time of the queue adding stage and the reservation stage is saved, the production cycle of the wafer goods batch is guaranteed, in addition, the machine capable of actually supporting goods running can be selected for the wafer goods batch in the queue adding stage based on the pre-verification result, and therefore the production cycle of the wafer goods batch is effectively shortened.

The application discloses a photolithography process window confirmation method and device, equipment and a storage medium, applied to the photolithography technical field, applied to an APC system, comprising: obtaining measurement data based on the APC system; obtaining the overstock condition of the current batch, and screening the measurement data according to the overstock condition of the current batch to obtain first screening data; comparing the line width data in the first screening data with standard line width data, and screening the first screening data according to the comparison result to obtain second screening data; drawing a Poisson curve according to the second screening data; and updating the overstock condition of the next batch according to the Poisson curve based on the automatic feedback mechanism of the APC system. Based on the automatic feedback compensation mechanism of the advanced process control system, the photolithography process window of the next batch is automatically generated according to the photolithography data of the current batch, so as to reduce the error caused by the artificial judgment of engineers and improve the production efficiency.