47 results about "Advanced process control" patented technology

The invention relates to the technical field of thermal power plant flue gas denitration, in particular to a thermal power plant APC advanced process control system and a denitration optimization method.The system comprises a data acquisition module for acquiring boiler combustion parameters, flue gas emission data and the operation state of a denitration system in real time; the multivariable predictive control module is used for optimizing the combustion efficiency and the NOx generation amount based on a dynamic matrix control algorithm; the denitration optimization decision module is used for dynamically adjusting the ammonia spraying amount through an ammonia escape feedback model; the intelligent coordination module integrates a unit load instruction and an environmental protection constraint condition and is used for cooperative control of combustion-denitration; according to the system, boiler combustion parameters, flue gas emission data and the operation state of the denitration system are obtained in real time through the data acquisition module, a dynamic matrix control algorithm of the multivariable prediction control module is combined, the NOx generation trend can be predicted in advance, the combustion efficiency can be optimized, and therefore the problem that adjustment is lagged when loads fluctuate in traditional PID control is effectively solved.

The invention relates to the technical field of advanced process control, in particular to an intelligent gold bonding wire real-time monitoring and optimizing method and system driven by the Internet of Things, and the method comprises the following steps: collecting the pressure and temperature data of a gold bonding wire, and obtaining the real-time data of the pressure and temperature of the gold wire; and based on the real-time data of the gold wire pressure and temperature, data verification is carried out, abnormal values are eliminated, and a preliminary data verification result is generated. The pressure and temperature data of the gold bonding wire are collected in real time, abnormal values are recognized and eliminated in time, the reliability of the data is guaranteed, and the accuracy of data analysis is improved; on the basis that reliable data are obtained, real-time data are compared with standard parameters, the deviation degree is rapidly positioned, and precise monitoring of the gold wire bonding process is achieved; furthermore, according to the deviation analysis result, the pressure and temperature parameters of the bonding equipment are adjusted in time, so that the actual production condition better meets the technological standard requirement.

The present disclosure provides a testing apparatus, which includes a plurality of devices under test (DUTs) and an advanced process control monitor (APCM). The APCM includes a switch circuit, a control circuit, a detection circuit, and an auxiliary control circuit. The switch circuit includes a plurality of switch devices corresponding to the DUTs. The control circuit includes a plurality of control devices corresponding to the switch devices, and is configured to sequentially activate one of the switch devices during a test procedure of the testing apparatus. The detection circuit is configured to provide a first power supply voltage to a first terminal of each switch device. The auxiliary control circuit is configured to provide a second power supply voltage to a second terminal of each switch device deactivated the control circuit.

An enterprise engineering and configuration system includes a common configuration database and support services stored in and executed in a compute fabric of an enterprise. The configuration database and support services use and implement a common configuration data schema to support the configuration of hardware and software in the compute fabric and at multiple different sites or physical locations of the enterprise even when different control and automation systems are used at these different sites or physical locations. The configuration system enables implementing hardware or software configuration changes to various different sites or locations of an enterprise either centrally from a configuration device connected directly to the compute fabric of the enterprise or locally from any physical location or site of the enterprise, while maintaining a single integrated enterprise configuration database that stores configuration data for each of the multiple sites of the enterprise. This configuration system is flexible as it enables engineering and configuration changes to be made by users anywhere in the enterprise for any of the sites of the enterprise and across different sites of the enterprise.

The invention relates to the technical field of industrial data acquisition and advanced process control, and discloses an intelligent temperature control method for an oligomeric anti-swelling ammonium salt preparation reaction process. The method comprises the following steps: identifying a reaction stage switching critical window based on a multi-point temperature field and thermodynamic parameters; a fifth-order polynomial nonlinear temperature setting track with continuous first-order and second-order derivatives is generated in the window; in combination with multi-area temperature measurement weighted average feedback and reaction heat release rate feedforward, the jacket medium flow is dynamically adjusted through feedforward-feedback compound control. The system comprises a multi-source data acquisition unit, a stage judgment unit, a track generation unit, a feedback control unit, a feed-forward compensation unit and an execution driving unit. The thermal disturbance is effectively inhibited, the standard deviation of molecular weight distribution of the product is reduced by more than 40%, and the batch consistency is remarkably improved.

The embodiment of the invention provides a winter construction reinforced concrete electromagnetic curing method and system based on a layered progressive mathematical control framework, and belongs to the technical field of crossing of intelligent construction, advanced process control and computational mathematics. The method comprises the following steps: acquiring temperature, hydration degree and environmental parameters in real time, performing space-time fusion with electromagnetic heating input, constructing a maintenance state feature vector, establishing a parameterized grey box prediction model based on a multi-physics coupling mechanism, and realizing online joint estimation of state and model parameters by combining Bayesian inference and unscented Kalman filtering. On this basis, distributed robust model predictive control is introduced, modeling is carried out on external disturbance uncertainty, an optimal heating strategy is generated, finally, execution of all heating subareas is coordinated through a distributed cooperative control algorithm, global optimization of the maintenance process is achieved, the temperature difference risk in winter construction is effectively reduced, and the maintenance efficiency is improved. The maintenance energy efficiency and the system operation stability are improved.

The invention discloses a cooperative control method and device for multiple fluidized bed boilers and a medium, and is applied to the field of advanced process control. The method comprises the following steps: acquiring a pressure change rate corresponding to a mother pipe pressure signal; determining a load adjusting instruction corresponding to the boiler according to the pressure change rate and the absolute value, and determining a corresponding load adjusting quantity according to the pressure change rate and boiler performance parameters corresponding to the boiler; and if the absolute value of the second derivative of the pressure change rate is not smaller than a decoupling threshold value in the process that the boiler carries out load adjustment according to the load adjustment instruction and the load adjustment quantity, corresponding air-coal decoupling compensation operation is determined according to the second derivative of the pressure change rate, and cooperative control is carried out based on the air-coal decoupling compensation operation and load adjustment. According to the method, the mother pipe pressure signal belongs to a feedforward signal in the boiler operation process, and compared with post feedback, the response speed is increased, and the response precision is improved. And the air-coal decoupling compensation operation and the load regulation are cooperatively controlled, so that the quality, the safety and the economy are improved.

A method for forming a semiconductor structure includes: providing a substrate, the substrate including a base and a layer to be etched, the substrate including a first region and a second region; forming a plurality of first initial mask structures on the first region, and forming a plurality of second mask structures on the second region, the initial first mask structures having a first width deviation dimension, and the second mask structures having a second width deviation dimension; forming a first sacrificial layer on the layer to be etched and the second mask structures; and etching the first initial mask structures to form a first mask structure based on a first advanced process control technology, the first mask structure having a second width dimension and a third width deviation dimension, wherein the third width deviation dimension is equal to the second width deviation dimension. By using the first advanced process control technology for algorithm optimization, the third width deviation dimension is made equal to the second width deviation dimension, eliminating the process step of forming an additional sacrificial layer and then covering the first mask structure.

A method for combining structural performance management techniques with execution of an advanced process control module includes reading, by an advanced process control (APC), process data from an asset. The method includes receiving, by a structural integrity analyzer, from the APC module, a request for an update to an asset integrity constraint for the asset. The structural integrity analyzer executes at least one structural analysis technique to compute at least one modification to make to the asset integrity constraint of the asset. The structural integrity analyzer provides, to the APC module, the at least one modification, responsive to the received request. The APC module identifies at least one updated operational setpoint, based upon the at least one modification. The APC module modifies at least one process parameter in a distributed control system to include the identified at least one updated operational setpoint.

The invention discloses an advanced process control system, method and equipment for semiconductor manufacturing and a medium. The system adopts a modular architecture, and aims to improve the flexibility of advanced process control in a complex production scene. The system comprises a plurality of core modules; a request receiving module is responsible for receiving a process parameter adjustment request; the protocol analysis module converts the request into an internal protocol; the workflow preprocessing module carries out data preprocessing and integrates contextual information such as equipment states and production batches. And the rule engine module executes logic judgment through configurable rule searching, rule execution and script plug-in units of the rule engine module. The workflow judgment module determines whether the workflow ends or not according to a preset process parameter threshold value or a time threshold value. The result aggregation module and the response return module finally return the processing result to the equipment automation program (EAP). According to the system, through modular design and integration of an intelligent rule engine, the ability of the workflow to deal with complex production conditions is effectively enhanced.

The invention provides a method for improving the electrical thickness stability of an ONO laminated layer in a memory device. The method comprises the following steps: obtaining the actually measured thicknesses of a first oxide layer, a silicon nitride layer and a deposited second oxide layer; multiplying the actually measured thickness of the silicon nitride layer by a conversion coefficient to obtain the equivalent oxide thickness; calculating the target thickness of a second oxide layer according to the target electrical thickness, the actually measured thickness of the first oxide layer and the equivalent oxide thickness of the silicon nitride layer; calculating a difference value between the actually measured thickness of the deposited second oxide layer and the target thickness; finally, advanced process control wet soak (APC Dip) treatment is performed on the second oxide layer based on the difference to adjust its thickness. According to the invention, the second oxide layer is adjusted directly based on the electrical thickness target and by considering the dielectric constant difference, so that the thickness fluctuation of the silicon nitride layer can be effectively compensated, the stability and control precision of the electrical thickness of the ONO lamination are remarkably improved, and the performance and yield of a memory device are improved.

Various embodiments described herein relate to systems and methods for testing Advanced Process Control (APC) strategies in a facility. In this regard, snapshots of a model predictive controller which is under operation in the facility is captured. Using the snapshots, a digital twin of a process unit is initialized. Then, a tuning overlay is rendered via a user interface. Further, inputs from a user via the user interface is received for fields in the tuning overlay. The inputs are associated with at least one APC strategy that is to be tested for the process unit. Based on the inputs, the at least one APC strategy is tested using the digital twin of the process unit. In response to the testing, results for the at least one APC strategy are rendered on the user interface. Also, based on the results, at least one operation of the process unit is modified.

The application discloses a sewage pool temperature self-adaptive control method and system and a medium, and belongs to the technical field of advanced process control, and comprises the following steps: collecting sewage pool basic data, forming a basic fluctuation amount, and obtaining a response delay time; determining an effective response window; generating a sample admission result; calculating and updating a temperature response coefficient in a corresponding direction; generating and issuing next-period temperature regulation execution parameters and next-period mixing execution parameters. The application generates a sample admission result in the effective response window, and only updates the temperature response coefficient according to the admitted sample, so that the accurate identification of the real temperature response change caused by the heat exchange action, the reliable update of the temperature response coefficient and the stable generation of the next-period control action are achieved, and the problems that the sewage pool temperature change is not clearly attributed in the prior art, the subsequent control parameters are incorrectly corrected, and the temperature regulation is delayed or the energy consumption is abnormally increased are solved.

The invention provides an advanced process control application feasibility analysis method, related equipment and a storage medium, and is applied to the technical field of automatic control. Respectively determining a first average value and a first standard deviation of the target system variables according to the obtained historical data, predicting a target average value of the key variables after advanced process control is applied according to the first average value and the first standard deviation of the target system variables, and finally determining the target average value of the key variables based on the target average value and the first average value of the key variables. According to the method, the analysis indexes used for representing the application feasibility of the advanced process control are determined, the corresponding analysis indexes are provided before the advanced process control is actually applied, a basis can be provided for enterprise decision making, and a standard can be provided for effect evaluation after project implementation.

The invention provides an advanced process control system and method, and the method comprises the steps: recording the batch number of an uncompleted Nth film layer if a baseline is changed, and recording the batch number of an uncompleted first film layer from the Nth film layer; updating the group corresponding to the first film layer by using the changed base line, and distributing the batch of the first film layer which is not changed in time to a new group by using analog data of the new group as feedback information or feedforward information; in the batch of which the Nth film layer is not completed, judging whether the production condition of the film layer aligned with the second film layer to the Nth film layer is a new base line or an original base line so as to judge whether the production condition of the second film layer to the Nth film layer is the new base line or the original base line, and if part of the batch of which the Nth film layer is not completed in any film layer is the new base line, judging whether the production condition of the film layer aligned with the second film layer to the Nth film layer is the original base line; a part of the batch of which the Nth film layer is not completed is the original base line, the batch corresponding to the new base line and the batch corresponding to the original base line cannot be divided into the same group, and if the new base line and the original base line exist in the same batch in any film layer, the batch of wafers are reserved at the current station.

An enterprise engineering and configuration system includes a common configuration database and a support service stored in and executed in a computing structure of an enterprise. The configuration database and support services use and implement a common configuration data schema to support the configuration of hardware and software in the computing fabric and at multiple different sites or physical locations of the enterprise, even when different control and automation systems are used at these different sites or physical locations. The configuration system enables hardware or software configuration changes to various different sites or locations of an enterprise to be implemented centrally or locally from a configuration device directly connected to the computing structure of the enterprise or from any physical location or site of the enterprise, a single integrated enterprise configuration database storing configuration data for each of a plurality of sites of the enterprise is simultaneously maintained. The configuration system is flexible because it enables a user to make engineering and configuration changes anywhere in the enterprise for any site of the enterprise and across different sites of the enterprise.

The invention relates to the technical field of power electronics and automatic control, discloses an intelligent control optimization method and system for a frequency converter, and aims to solve the problems that an existing frequency converter control strategy depends on a fixed model, is poor in adaptability, lacks online learning ability and is insufficient in multi-target collaborative optimization. The method comprises the following steps: acquiring a multi-source operation signal of the frequency converter in real time, and carrying out denoising and normalization processing; extracting a working condition vector containing steady-state deviation, dynamic fluctuation and load change characteristics; a system on-line identification model is constructed by using a gating cycle unit (GRU) network, and real-time prediction of dynamic characteristics is realized. According to the invention, through integration of advanced process control and machine intelligence, adaptive adjustment of complex working conditions is realized, control precision, response speed and energy efficiency level are significantly improved, strategy autonomous evolution is supported, maintenance cost is reduced, and stable operation of the system is guaranteed.

Embodiments of the present disclosure provide improved asset monitoring. A set of one or more performance indicators for an asset is identified. A set of one or more weighted performance indicator scores corresponding to the set of one or more performance indicators is generated. A performance health score for the asset is generated for the asset based on the set of one or more performance indicators and uptime data by aggregating the set of one or more performance indicators with respect to the uptime data. Performance of one or more prediction-based actions based on the performance health score.

A method for forming a semiconductor structure includes: providing a substrate, the substrate including a base and a layer to be etched, the layer to be etched including a first region and a second region, the first region having a plurality of first initial mask structures thereon, and the second region having a plurality of second mask structures thereon; forming a sacrificial layer on the second region; performing etching processing on the first initial mask structures to form first mask structures; forming a protective layer on sidewalls and top surfaces of the first mask structures and on sidewalls and top surfaces of the second mask structures based on a first advanced process control technology; and etching the layer to be etched to form a plurality of patterned structures on the base. The first advanced process control technology can compensate feature sizes of the first mask structures and the second mask structures at the same time, and thus the feature sizes of the second mask structures also conform to preset feature sizes, thereby ensuring accuracy of subsequent pattern transfer and improving wafer production yield and reliability.

The invention relates to the technical field of advanced process control and industrial data acquisition, and discloses an online friction resistance test-based intelligent production method of an acid solution thickening agent, which comprises the following steps of: acquiring a pressure drop signal in real time through an online friction resistance sensing unit, calculating a friction resistance coefficient sequence by combining temperature and flow velocity, and extracting time-frequency characteristics through multi-scale wavelet decomposition; fusing the initial formula parameters, inputting a pre-trained crosslinking degree-friction coupling neural network model, and outputting an equivalent crosslinking density estimated value; based on the deviation, a model prediction control algorithm is adopted to generate a proportion correction instruction, and the raw material feeding flow is dynamically adjusted. According to the method, a static threshold judgment mode for friction data in a traditional intelligent production system is abandoned, and a dynamic physical-data hybrid model between a friction signal and a thickening agent molecule cross-linked network is established for the first time. Fluid micro-disturbance is captured by an online friction sensing unit at a kilohertz-level sampling frequency, and molecule entanglement and crosslinking state information contained in the fluid micro-disturbance is analyzed and extracted in combination with multi-scale wavelets.

The invention provides an intelligent gypsum oxidation and dehydration comprehensive process optimization method for wet desulphurization. The method comprises the following steps: installing a sulfite and gypsum moisture content online detector in a desulphurization system to construct an intelligent sensing system; an oxidation air utilization rate model is established, and the oxidation air volume is dynamically calculated and adjusted in a variable frequency mode according to the SO2 removal amount; establishing a dehydration operation control model, and dynamically adjusting parameters such as vacuum degree and filter cake thickness; constructing an oxidation-dehydration coupling model to realize system collaborative optimization; and finally, advanced process control is implemented through integration of the intelligent environment-friendly island digital intelligent platform. According to the method, the remarkable energy-saving effect that the electricity-saving rate of the oxidation fan exceeds 20% and the electricity-saving rate of the vacuum pump reaches 35% is achieved, the water content of gypsum is stably controlled to be 9.5% or below, the problems that a traditional process is high in energy consumption, unstable in operation and lack of collaborative optimization are effectively solved, and the method has both environmental protection and economic benefits.

The present disclosure relates to a method of enhancing an operation of a process plant. The method comprises configuring a primary controller to be connected to one or more secondary controllers via conjoint variables and sending at least one optimization call to the one or more secondary controllers, where the conjoint variables in the primary controller has a PWO limit and conjoint variables in the one or more secondary controllers has an advanced process control (APC) limit. A proxy limit is received from the one or more secondary controllers in response to the at least one optimization call and the APC limit and received proxy limit is analysed to determine an optimal target. The optimal target is sent to the one or more secondary controllers, which are instructed to adjust the APC limit to the optimal target.

The invention relates to the field of thermal power plant intelligent control, and provides a thermal power generating unit depth peak regulation coordination method and system, and the method comprises the steps: collecting a video data stream and a broadband sound wave signal, and generating a high-dimensional time sequence data frame sequence through the alignment of acoustic atom dictionary timestamps; extracting visual and acoustic feature embedding vectors, constructing a heterogeneous dynamic graph, and analyzing spatio-temporal evolution to generate a future combustion instability index; an unstable mode code and a future risk index are generated based on an expert rule base, an enhanced state vector is constructed by fusing real-time macroscopic state parameters, and an optimal control instruction set is generated by an intelligent agent through optimization under dynamic constraint; the instruction set is decoded into a control signal sequence through multiple safety verification, a risk index difference value before and after intervention is compared to generate a validity evaluation index, and the validity evaluation index is packaged into an experience playback tuple to update agent parameters. According to the method, multi-mode space-time prediction and self-adaptive control are fused, a combustion instability precursor prediction and look-ahead control closed loop is constructed, and the method is suitable for intelligent monitoring and advanced process control of a thermal power plant.

The invention relates to the technical field of coal water slurry gasification furnaces, in particular to an advanced process control method, device and equipment for an entrained-flow bed coal water slurry gasification furnace and a computer storage medium. According to the advanced process control method of the entrained-flow bed coal water slurry gasification furnace, the maximization of effective gas yield is taken as a target, the coal is enabled to completely react as far as possible by adjusting the ratio of oxygen to coal, and meanwhile, the slag bonding of the gasification furnace is avoided by monitoring the pressure difference of a slag hole. Secondly, as black water in the chilling chamber contains a large amount of solid substances, the valves are easy to block, in order to ensure the usability of the valves, two black water angle valves are arranged, one black water angle valve is standby, and the other black water angle valve is used and switched regularly; and finally, adjusting a valve according to the combustion state to carry out temperature control on the liquid levels of the chilling chamber and the washing chamber so as to realize unattended operation. According to the invention, multivariable process control can be intelligently and automatically carried out, and real-time optimization of effective gas yield and reduction of energy consumption are realized.

The application discloses a kind of multi-flow fluidized bed boiler collaborative control method, equipment and medium, applied to advanced process control field.The method comprises: obtaining the pressure change rate corresponding to mother pipe pressure signal;According to the size and absolute value of pressure change rate, determine the load adjustment instruction corresponding to boiler, and according to pressure change rate and the load adjustment amount corresponding to the furnace nature parameter of boiler;If in the process that boiler carries out load adjustment according to load adjustment instruction and load adjustment amount, the absolute value of the second derivative of pressure change rate is not less than decoupling threshold, then according to the second derivative of pressure change rate, determine the corresponding wind coal decoupling compensation operation, and based on wind coal decoupling compensation operation and load adjustment collaborative control.The method in this method, mother pipe pressure signal is in boiler operation belongs to feedforward signal, compared with "after the fact" feedback, improve response speed and accuracy.And wind coal decoupling compensation operation and load adjustment collaborative control, improve quality and safety economy.

The invention relates to the technical field of metallurgical automation, in particular to a submerged arc furnace load APC advanced process control method, which is applied to a submerged arc furnace and comprises the following steps: when the submerged arc furnace is in a load mode and inputs a primary total active power set value, performing deviation judgment on a real-time filtering value of primary total active power and the primary total active power set value; when the deviation between the real-time filtering value of the primary total active power and the set value of the primary total active power is larger than or equal to a threshold value, the submerged arc furnace works in a synchronous mode; and when the deviation between the real-time filtering value of the primary total active power and the set value of the primary total active power is smaller than a threshold value, the submerged arc furnace works in a step-by-step mode. On the basis of realizing stable control of the electric furnace load under the normal load fluctuation working condition, when abnormal and special working conditions, such as external line voltage fluctuation and electrode bias, occur, the auxiliary control is utilized to optimize, solve abnormal fluctuation and perform deviation correction control on the special working conditions. According to the invention, a function of controlling parameter optimization in different gear ranges can be realized.

The present invention discloses a method for manufacturing a memory device / logic device compatible semi-floating gate transistor. A hard mask is not used to form a U-shaped groove, so that the semi-floating gate polysilicon is prevented from being buried between the hard masks, the etching depth-to-width ratio of the contact window can be reduced, and the first semi-floating gate polysilicon does not need to be etched back. Moreover, since a hard mask is not used to form the U-shaped groove, after depositing the second semi-floating gate polysilicon, there is no thickness difference between the first active area and the semi-floating gate polysilicon on the X-direction shallow trench isolation. The thickness of the semi-floating gate polysilicon in the logic area and the memory area is consistent before and after the floating gate polysilicon is etched back. Therefore, online measurement can be established, and the thickness of the semi-floating gate polysilicon in the memory area can be precisely controlled by using advanced process control to etch to a target thickness, which can reduce process difficulty and facilitate mass production.

The application discloses a tunnel collapse collaborative treatment system and method based on a twin model prediction, and belongs to the technical field of underground engineering disaster prevention and treatment. The system comprises a multi-source fusion intelligent perception layer, a digital twin analysis and decision-making layer and a distributed collaborative execution layer. The perception layer collects data in real time; the decision-making layer constructs a dynamic digital twin and runs a model prediction control algorithm, performs simulation prediction and rolling optimization, and generates collaborative control instructions; and each terminal of the execution layer receives the instructions and collaborates. Through the "perception-simulation-prediction-execution" closed loop, the digital twin and advanced process control theory are deeply integrated, the problems of traditional treatment measures, such as dispersion, poor collaboration and decision lag, are solved, advanced simulation, dynamic optimization and adaptive collaborative control of the collapse treatment process are realized, and the safety, efficiency and structural reliability are significantly improved.

The invention belongs to the technical field of submerged arc furnace smelting, and relates to a submerged arc furnace electrode position APC advanced process control method which is applied to submerged arc furnace electrode equipment and comprises the steps that the electrode position, electrode electrical parameters, hearth pressure and pressure release data of a submerged arc furnace are collected to serve as an original data set; preprocessing data in the original data set through a mean filtering method; establishing a working condition identification program according to data in the original data set; establishing a transfer function model based on a single-input single-output system of electrode lifting; and designing a submerged arc furnace electrode lifting control mode according to different working conditions. According to the invention, advanced lifting process control of the submerged arc furnace electrode equipment is realized; three electrode lifting control modes are developed, and control optimization is carried out aiming at special working conditions; the application of the GPC generalized predictive control technology enhances the technical reserve of advanced control practical application.

A method for combining structural performance management techniques with execution of an advanced process control module includes reading, by an advanced process control (APC), process data from an asset. The method includes receiving, by a structural integrity analyzer, from the APC module, a request for an update to an asset integrity constraint for the asset. The structural integrity analyzer executes at least one structural analysis technique to compute at least one modification to make to the asset integrity constraint of the asset. The structural integrity analyzer provides, to the APC module, the at least one modification, responsive to the received request. The APC module identifies at least one updated operational setpoint, based upon the at least one modification. The APC module modifies at least one process parameter in a distributed control system to include the identified at least one updated operational setpoint.