Levelness adjusting structure, lifting device and cavity

Abstract

The invention provides a levelness adjusting structure used for adjusting the levelness of a bracket. The levelness adjusting structure comprises the bracket, a supporting part and supporting pipes, wherein a plurality of fastening pieces used for connecting the bracket with the supporting pipes are arranged on the bracket; the supporting part is arranged on the lower surface of the bracket or on the upper surfaces of the supporting pipes, and between the bracket and the supporting pipes, so as to support the bracket, and ensure that each fastening piece can adjust the distance between the bracket and one supporting pipe to adjust the levelness of the bracket. Correspondingly, the invention further provides a lifting device and a cavity. Compared with the prior art, the levelness adjusting structure has the advantages that operation for adjusting the levelness of the bracket can be simplified remarkably; the levelness of the bracket can be adjusted more visually and conveniently.

Description

technical field [0001] The invention relates to the field of semiconductor equipment manufacturing, in particular to a level adjustment structure, a lifting device and a chamber. Background technique [0002] In the semiconductor manufacturing process, in order to improve production efficiency, robots are usually used to complete the transfer of wafers in various chambers. In order to meet the needs of manipulators for transferring wafers, support pins are usually provided in various chambers, and the support pins can lift or lower the wafers through the base in the chamber under the action of the lifting device, so that the wafers can Separated from the base, it is convenient for the transfer of the manipulator. [0003] Existing lifting devices such as figure 1 and figure 2 As shown, the support pin 10 is arranged on the bracket 20, and the bracket 20 is connected with the lift tube 31 of the lifting device 30. The bracket 20 can move up and down with the lift tube 31,...

AI Technical Summary

Problems solved by technology

[0005] When adjusting the levelness of the bracket 20 in the above existing structure, the screws 21 and the thimbles 22 often need to be adjusted together, and the screws 21 and the thimbles 22 also need to be adjusted. The adjustment process is often cumbersome and often It needs to be adjusted many times to get the ideal effect, and the labor cost is high

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