Oven body device

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, and provides an oven body device. One side of the oven body is connected to a primary circuit, the other side of the oven body is provided with two or more branch circuits, and the branch circuits are connected to the primary circuit in parallel, the primary circuit is provided with power supply connectors, the end portions of the branch circuits are each provided with an output wire connector, the output wire connectors are used for connecting accessing wire connectors, the branch circuits are all provided with power controllers, the power controllers are connected with a power control unit simultaneously, and the power control unit is used for sending the same or different control signals to each power controller of a corresponding branch circuit. The oven body device disposes a plurality of the output wire connectors and breaks the characteristic that the traditional device has only one output wire connector, the aim that baking is divided into a plurality of sections for the same oven body or baking in the same time for a plurality of types of oven bodies are achieved, and the working efficiency and applied range are both improved and expanded obviously.

Description

technical field [0001] The invention relates to the technical field of semiconductor process equipment, in particular to an oven body device used in the furnace body manufacturing process that can bake the furnace body in sections. Background technique [0002] For the furnace body made of the insulation layer containing strengthening agent, before the furnace body is used, the insulation layer should be baked at high temperature, so as to purify the insulation layer. At present, the baking temperature of the furnace body is mostly above 800 °C , and some high-temperature furnaces require higher temperatures to purify the insulation layer due to the thicker insulation layer. [0003] The heating source for the traditional oven body device to bake and purify the furnace body is the resistance wire of the furnace body itself. Since there will be carbide, sulfide and other gases overflowing during the baking process, this kind of baking is usually not allowed on the machine. F...

AI Technical Summary

Problems solved by technology

[0004] Existing oven body devices usually have a single output terminal. With the development of the diversity of furnace insulation layer materials and how to bake the furnace body in sections for different thicknesses of the furnace body insulation layer, it has become an art field. Technologists urgently need to solve technical problems

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