Three-dimensional displacement measuring method based on morphology correlation calculation
A displacement measurement and related calculation technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of artificial spotting and high requirements for illumination uniformity
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[0050] see first figure 1 and figure 2 , figure 1 It is the main optical path diagram of the three-dimensional displacement measurement method of the present invention to realize the shape correlation calculation, figure 2 is the free-space optical path diagram for calibrating the spectral system in the present invention. The light source 1 used in the embodiment of the present invention is a supercontinuum broadband laser light source with a center wavelength of 840 nm and a bandwidth of 50 nm.
[0051] Described two-dimensional scanning galvanometer 9 single deflection angles are 0.02 °, and described focusing system 10 is Thorlabs LSM04-BB lens, and the focal length of its lens is 18.9mm, and working distance is 42.3mm, obtains dx=dy= 6.6um;
[0052] The number of pixels M=2048 of the streak camera 14 used;
[0053] The size of the component to be tested is 0.5mm*0.3mm;
[0054] The two-dimensional scanning range is 2.64mm*2.64mm;
[0055] The three-dimensional dis...
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