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Three-dimensional Displacement Measurement Method Based on Shape Correlation Computation

A technology of displacement measurement and correlation calculation, which is applied in the direction of measuring devices, instruments, and optical devices, etc., and can solve the problems of high uniformity of illumination and artificial speckle.

Active Publication Date: 2017-03-15
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The advantage of this method is that it has high measurement accuracy and can achieve sub-micron measurement, but the disadvantage is that it requires high illumination uniformity, requires artificial speckle processing on the target to be measured, and can only perform two-dimensional measurement at a time.

Method used

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  • Three-dimensional Displacement Measurement Method Based on Shape Correlation Computation
  • Three-dimensional Displacement Measurement Method Based on Shape Correlation Computation
  • Three-dimensional Displacement Measurement Method Based on Shape Correlation Computation

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Embodiment

[0050] see first figure 1 and figure 2 , figure 1 It is the main optical path diagram of the three-dimensional displacement measurement method of the present invention to realize the shape correlation calculation, figure 2 is the free-space optical path diagram for calibrating the spectral system in the present invention. The light source 1 used in the embodiment of the present invention is a supercontinuum broadband laser light source with a center wavelength of 840 nm and a bandwidth of 50 nm.

[0051] The single deflection angle of the two-dimensional scanning galvanometer 9 is 0.02 °, and the focusing system 10 is a ThorlabsLSM04-BB lens, and the focal length of its lens is 18.9mm, and the working distance is 42.3mm, and dx=dy=6.6 um;

[0052] The number of pixels M=2048 of the streak camera 14 used;

[0053] The size of the component to be tested is 0.5mm*0.3mm;

[0054] The two-dimensional scanning range is 2.64mm*2.64mm;

[0055] The three-dimensional displacem...

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Abstract

The invention relates to a three-dimensional displacement measuring method based on morphology correlation calculation. The method comprises the following steps of using ultra-continuous wide band laser to scan and image a to-be-measured object in a point-to-point way through a scanning galvanometer, and comparing the three-dimensional morphology information of the to-be-measured object before and after movement; selecting a proper center point and an adjacent area from the image before movement as a correlation operation area; then, selecting a center point and an adjacent area with the same size from the image after movement in a scanning way, and performing correlation operation; finally, finding a point with a largest correlation coefficient as a position after movement, respectively subtracting the coordinates of the two points to obtain relative displacement in an x-y plane, and subtracting the numbers of the two points to obtain displacement along a z-axis direction. The method has the characteristics that any requirement and processing on the to-be-measured object are not needed, and the three-dimensional displacement measurement on the object can be realized through calculation by one-time measurement; the operation is simple, the accuracy is higher, the requirement on the to-be-measured object is low, and the application range is wider.

Description

technical field [0001] The present invention relates to three-dimensional displacement measurement of objects, in particular a three-dimensional displacement measurement method based on shape correlation calculation. The method does not require any requirements and processing on the object to be measured, and the three-dimensional displacement of the object can be realized through calculation in one measurement. Measurement. This method is easy to operate, has high precision, and has low requirements on the target to be measured, so it has a wide range of applications. Background technique [0002] Three-dimensional displacement measurement in space is very important for daily life, industrial production and scientific research. For humans and many animals, three-dimensional positioning is achieved through different viewing angles of the same object with both eyes, and many positioning methods currently used more or less adopt a similar principle, that is, by viewing object...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 孙晓鹏刘诚朱健强
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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