A zero sensor adjustment device and method

Abstract

The invention discloses a zero position sensor, comprising: a base for positioning, supporting and containing the zero position sensor; an adjustment plate, including a first positioning pin, the adjustment plate can slide on one side of the base, the The adjusting plate is provided with a first positioning hole and a locking device, the locking device is used to lock the relative position of the adjusting plate and the base; the laser collimator is used to emit laser, and the laser collimating mirror is installed on the On the base; the pyramid reflector has three mutually perpendicular light reflecting surfaces and a large round end surface, which is used to receive and reflect the incident light of the laser collimator; the position sensor is used to receive the reflected light of the laser, the The reflected light forms a reflected light spot on the position sensor, the position sensor is installed on the base, and the position of the position sensor and the laser collimator is relatively fixed.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a zero-position sensor adjustment device and method. Background technique [0002] The laser interferometer system is used in the position measurement system of the lithography machine. Since the laser interferometer is an incremental measurement system that can only provide accurate measurement of relative displacement, it is necessary to use a zero position sensor to provide a position for the laser interferometer as an initial zero point. [0003] In the patent application number CN201010530550.6, a structure of a two-degree-of-freedom zero position sensor is disclosed. The PSD (two-dimensional planar photoelectric position sensor) is fixed on the base, and the laser collimator is fixed inside the base. structure on the adjustment plate. Such as figure 1 as shown in, figure 1 It includes a base 1, an adjustment plate 2, a laser collimating mirror 3...

AI Technical Summary

Problems solved by technology

In this way, there is one more component, which is relatively complex in structure, and one more error item affects the accuracy, and also causes a series of problems in manufacturing, assembly, cost, etc., see figure 1

[0007] Again, in order to accommodate the downward extension structure of the adjustment plate, and to leave enough space for adjustment, the base block must open a hole large enough to serve as a main load-bearing member. The existence of this large hole near the fixing screw is very important The overall stress before and after locking and fixing will have a greater negative impact

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