Integrated circuit standard sample characteristic parameter measurement device and method

Abstract

An integrated circuit standard sample characteristic parameter measurement device, comprising: a pin division unit, used to divide the pins of the standard sample into control pins and measurement pins; a signal division unit, used to divide the pin signals into measurement signals and control signals; the measurement circuit establishment unit is used to control the external instrument to generate measurement signals, and distribute the measurement signals to the characteristic parameter measurement pins of the standard sample through the characteristic parameter measurement board to form an independent measurement circuit of the standard sample; the working circuit establishment unit, It is used to generate a control signal through the integrated circuit test system, and distribute the control signal to the control pin of the standard sample through the characteristic parameter measurement board to form a working loop of the standard sample; the measurement result acquisition unit is used to make the standard sample in the control signal Working together with the measurement signal, the external instrument is controlled to measure the measurement signal fed back by the standard sample to obtain the measurement result of the characteristic parameter.

Description

technical field [0001] The invention relates to the technical field of microelectronic testing and measurement, in particular to an integrated circuit standard sample characteristic parameter measuring device and method. Background technique [0002] Integrated circuit standard samples (referred to as standard samples) are ASICs for which one or more characteristic parameters have been determined, and are mainly used for calibration of integrated circuit test systems and laboratory comparisons. By measuring the characteristic parameters of the standard sample to obtain the value of the standard sample, only the standard sample that has been strictly valued can have traceability, so that it has the ability to calibrate the integrated circuit test system. [0003] At present, the measurement of the characteristic parameters of the standard sample needs to partially or completely use the integrated circuit test system to form the measurement circuit of the standard sample. Sin...

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Problems solved by technology

[0004] In order to solve the problem that the existing standard sample characteristic parameter measurement results cannot make the standard sample have an accuracy level better than that of the integrated circuit test system, which limits the scope of use of the standard sample, so that the standard sample can only be used for value comparison and cannot complete the measurement. In view of the shortcomings of value transmission / traceability, a device and method for measuring the characteristic parameters of integrated circuit standard samples is proposed. The present invention distinguishes the measurement circuit of the standard sample from the working circuit, on the basis of ensuring that the accuracy of the measurement results meets the requirements for value traceability , this method is versatile and can meet the measurement requirements of characteristic parameters of different types of standard samples

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