Optical Measurement System with Synchronous Data Acquisition Mechanism
An optical measurement system and a technology for synchronizing data, which can be used in spectrum investigation and other directions, can solve the problems of calculation error analysis results of optical axis position, large error of motor optical axis position, etc.
Active Publication Date: 2017-12-08
RAINTREE SCI INSTR SHANGHAI
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Problems solved by technology
Even if the speed stability reaches one thousandth, the position error of the motor optical axis is quite large.
Therefore, the calculation error of the optical axis position caused by the unstable motor speed cannot be ignored for the analysis results
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[0032] Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
[0033] figure 1 It is a schematic diagram of a synchronous trigger system architecture according to an embodiment of the present invention. The system includes: a light source 11 , a polarizer 12 , a polarizer 13 , a detector 14 , a signal converter 15 , a motion control card 16 and an industrial computer 17 .
[0034] Depend on figure 1 It can be seen that the light path direction of this embodiment is that the light source 11 generates ...
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The present invention provides an optical measurement system, comprising: a detection unit for collecting spectral data reflected from a sample surface; a motion unit for adjusting the spectral data incident on the detection unit and recording the first spectral data corresponding to the spectral data position information; and an industrial control unit for receiving spectral data from the detection unit and the first position information recorded from the motion unit, and for controlling the motion unit to adjust the spectral data incident to the detection unit; wherein the detection unit is triggered by hardware The first position information is recorded by triggering the motion unit, and the motion unit triggers the detection unit to start or stop collecting spectral data through a hardware trigger. The invention realizes the synchronous acquisition of the spectral data and the position of the optical axis through the interaction between the detector triggered by the hardware and the motion control card, without being affected by the unstable rotation speed of the polarization inspection motor.
Description
technical field [0001] The invention relates to an optical measurement system, in particular to an optical measurement system with a synchronous data acquisition mechanism. Background technique [0002] A spectroscopic ellipsometer is an optical measurement device used to probe film thickness, optical constants, and the microstructure of materials. Ellipsometer is a non-destructive measurement method. In recent years, the combination of ellipsometry technology and microcomputer has achieved the effect of simplification of measurement steps and faster calculation, which has given this ancient method a new life. It is widely used in various fields, such as physics, chemistry, material and photographic science, biology and optics, semiconductor, machinery, metallurgy and biomedical engineering. [0003] The spectroscopic ellipsometer needs to obtain the spectral signals of the polarizer at different angular positions. Only when the spectral data collected by the detector corr...
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IPC IPC(8): G01J3/28
Inventor 邱青菊高海军党江涛王勇郭一鸣
Owner RAINTREE SCI INSTR SHANGHAI