System and method for preventing microscope objective lens from colliding with substrate, and image acquisition system
A microscope objective lens and image acquisition technology, applied in the field of microscopy, can solve the problems of lens or stage substrate damage, unsatisfactory effect, delay in poor analysis and reverse analysis, etc.
Active Publication Date: 2017-09-26
CHENGDU VISTAR OPTEOLECTRONICS CO LTD
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Problems solved by technology
In practice, it is found that when the microscope is used, when switching from a low-magnification objective lens to a high-magnification objective lens, the objective lens is very likely to collide with the substrate of the stage, resulting in damage to the lens or the substrate of the stage, which greatly delays the analysis of defects. And reverse analysis and other work
To solve this problem, the existing solution is to strengthen the training of microscope users or remind users to pay attention by posting precautions around the microscope, but the effect is not ideal
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[0026] It has been mentioned in the background art that currently, when switching from a low magnification objective lens to a high magnification objective lens during the use of a microscope, the lens easily collides with the substrate of the stage, thereby damaging the guide substrate or the lens. The inventor found through research that this is because the lens length of the high-magnification objective lens is greater than or equal to the lens length of the low-magnification objective lens. The lens can easily collide with the substrate. If the objective lens has been focused before switching, and the components of the microscope are within a reasonable range, it is unlikely that the lens will collide with the substrate.
[0027] Based on this, the present invention provides a system and method for preventing the microscope objective lens from colliding with the substrate, setting the sharpness threshold for the alarm, and when switching from a low-magnification objective ...
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The invention provides a system and method for preventing a microscope objective lens from colliding with a substrate, and an image acquisition system. The method sets the sharpness threshold for an alarm, and when switching from a low-magnification objective lens to an adjacent high-magnification objective lens, the measured The sharpness value of the sample is compared with the sharpness threshold. If the sharpness value is less than the sharpness threshold, an alarm action is triggered to remind the microscope user to avoid collision between the objective lens and the substrate when the objective lens is not in focus. event.
Description
technical field [0001] The invention relates to the field of microscopes, in particular to a system and method for preventing a microscope objective lens from colliding with a substrate, and an image acquisition system. Background technique [0002] In recent years, the central position of the display market has been gradually occupied by Flat Panel Displays (FPDs). A large-sized, thin and light display device can be manufactured using the FPD. This type of FPD includes a liquid crystal display (Liquid Crystal Display, LCD) and an organic light emitting diode (Organic Light Emitting Diode, OLED) display and the like. [0003] Microscope is a standard tool used in OLED industry for bad analysis and reverse analysis. In practice, it is found that when the microscope is used, when switching from a low-magnification objective lens to a high-magnification objective lens, the objective lens is very likely to collide with the substrate of the stage, resulting in damage to the len...
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IPC IPC(8): G02B21/00G02B21/36
Inventor 刘敏
Owner CHENGDU VISTAR OPTEOLECTRONICS CO LTD