Photosensitive resin composition, and insulating film and electric device using same
A photosensitive resin and composition technology, applied in optics, optical components, opto-mechanical equipment, etc., can solve problems such as wrinkling and uneven surface of metal film, and achieve the effect of good pattern formation and excellent surface formation
Inactive Publication Date: 2015-10-28
ROHM & HAAS ELECTRONICS MATERIALS LLC
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Problems solved by technology
[0006] However, if a conventional negative photosensitive resin composition is used to form a patterned cured film, a patterned electrode (metal film) is formed
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The invention discloses a photosensitive resin composition, and an insulating film and an electric device using the same. When the photosensitive resin composition is made into a cured film, good patterns can be formed. When a metal film is applied to the cured film, by controlling the amount of polymerizable compound and residual monomers, of copolymer, which are not consumed in the copolymerization process, an excellent surface is formed, and therefore the photosensitive resin composition can be used as an interlayer insulating film in TFT-LCD.
Description
technical field [0001] The present invention relates to a photosensitive resin composition for forming an interlayer insulating film in a thin film transistor liquid crystal display (TFT-LCD), especially a negative photosensitive resin composition. Background technique [0002] The positive and negative photosensitive resin compositions are used in the manufacture of insulating films for various display devices including liquid crystal displays (LCDs), organic light emitting diodes (OLEDs), and the like. [0003] However, during the process of exposure, post-baking after development, and absorption of short-wavelength light (such as ultraviolet rays), the positive-type photosensitive resin composition containing a conventional alkali-soluble resin and a diazide 1,2-quinone compound generally has Problems such as discoloration due to pyrolysis or undesired subsequent imaging in LCDs due to impurity generation. [0004] Attempts have been made to solve these problems by provi...
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Login to View More IPC IPC(8): G03F7/038G03F7/033
CPCG02B5/201G03F7/0045G03F7/0233G03F7/027G03F7/033G03F7/038G03F7/039G03F7/0392G03F7/0758
Inventor E-G·金S-K·金K·J·朴
Owner ROHM & HAAS ELECTRONICS MATERIALS LLC
