Planar ultrasonic motor driven by h-shaped piezoelectric transducer structure and its working method
A piezoelectric energy conversion, planar technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve problems such as slow motor speed, achieve stable operation, realize The effect of miniaturization, avoidance of plane motion errors
Inactive Publication Date: 2017-02-01
NANCHANG HANGKONG UNIVERSITY
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Problems solved by technology
In 2007, Aoyama, Japan developed a planar motor with nanometer-level positioning accuracy based on the piezoelectric electrostrictive effect, but the speed of the motor was extremely slow, and it was only suitable for driving a micro-manipulation platform; in 2012, Scuor designed a five-freedom motor based on an ultrasonic motor. degree positioning platform
So far, there are no other ultrasonic motors with similar principles and structures to the present invention at home and abroad
Method used
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Embodiment
[0037] Embodiment: The present invention is based on a planar ultrasonic motor driven by an H-shaped piezoelectric transducer structure, including a stator assembly 1, a mover assembly 2 and a support assembly 3, see Figure 1 to Figure 4 . The support assembly 3 is connected to the mover assembly 2 through the fixed vertical plate 31 on one side of the bottom plate 32, the stator assembly 1 is located between the support assembly 3 and the mover assembly 2, and is connected to the mover assembly 2 through the driving foot 111, and The stator fixing screw 37 of the support assembly 3 is connected to the bottom plate 32; the stator assembly 1 includes an H-shaped structural plate 11 and a piezoelectric ceramic excitation assembly 12, and the H-shaped structural plate 11 is connected by two longitudinal rods 114 and the middle section of the longitudinal rod 114. The horizontal bar 115 is formed, the vertical bar 114 is provided with an adjustment hole 112, and the middle of the...
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The invention discloses a planar ultrasonic motor driven by an H-shaped piezoelectric transducer structure and its working method. The support assembly is connected to the moving subassembly through a vertical plate fixed on one side of the bottom plate, and the stator assembly is located on the support. Between the seat assembly and the mover assembly, the drive foot is connected to the mover assembly, and the stator fixing screw of the support assembly is connected to the bottom plate. The invention adopts a simple H-shaped structure stator, and at the same time realizes the direct drive of the two linear degrees of freedom of the mover, so that the motor can produce micron-level or even higher-precision precision motion, and the motor has fast response characteristics; the stator assembly The two pairs of driving feet alternately push the mover assembly to move in a plane, which can double the output power of the motor and make the motor run more stably; use the driving feet set in the plane of the H-shaped structural plate to drive the mover, which is beneficial Realize motor miniaturization and flat design.
Description
technical field [0001] The invention relates to a two-degree-of-freedom planar ultrasonic motor compound-driven by two-phase in-plane vibration working modes and one-phase out-of-plane vibration working mode of an H-shaped structural plate, belonging to the field of multi-freedom ultrasonic motors. Background technique [0002] Ultrasonic motors are indispensable and important executive components of modern manufacturing equipment, aerospace devices, new weapons, household and office automation equipment, and can be divided into rotary type, linear type, single degree of freedom, multi-degree of freedom and other forms. At present, the technology of rotary and linear ultrasonic motors is becoming more and more mature, and the industrialization of ultrasonic motors is mainly concentrated on these two types of motors. As a specific type of multi-degree-of-freedom motors, planar ultrasonic motors (PUSM) Linked features lead to a sharp increase in technical conflicts, complex de...
Claims
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IPC IPC(8): H02N2/00
Inventor 贺红林肖智勇刘文光廖永林
Owner NANCHANG HANGKONG UNIVERSITY