Method for traceability white light interference atomic-power probe to automatically position workpiece

Abstract

The invention discloses a method for a traceability white light interference atomic-power probe to automatically position a workpiece. The method comprises steps of recording an original displacement of a laser interference displacement metering system before a nanoscale displacement platform moves, quickly and upwardly generating an appropriate amount of displacement in a perpendicular direction, determining whether the atomic-power probe positions the workpiece through the fact whether a movement amount of a zero level stripe is in a threshold range after the displacement happens, if the nanoscale perpendicular displacement has not positioned the workpiece by the time when reaching a limit displacement movement, recording a final position, resetting the nanoscale perpendicular displacement platform, and repeating the above steps until the workpiece is positioned. The method disclosed by the invention is not limited by the distance between the probe and the workpiece, the displacement can be metered during the positioning process, and the traceability can be realized. To determine whether the probe positions the workpiece through the movement amount of the zero level stripe has the effects of fast positioning and high accuracy.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise surface topography measurement. More specifically, it is an automatic positioning method for workpieces based on traceable metrology and white light interference. Background technique [0002] The white light interference atomic force scanning probe microscope uses the zero-order fringes of white light to quantify the deformation of the atomic force scanning probe, thereby indirectly obtaining the height of the workpiece surface. The deformation principle of the atomic force scanning probe is the van der Waals force between atoms. During measurement, the tip of the atomic force scanning probe is equivalent to an atom, and an atom on the surface of the sample to be measured will interact with the tip of the atomic force scanning probe, causing the cantilever of the atomic force scanning probe to deform. The white light interference fringes formed on the cantilever will move accordingly, and...

AI Technical Summary

Problems solved by technology

The range of force between atoms is usually in the unit order of nm, so to achieve accurate positioning, either use high-precision distance measuring instruments, or only rely on human manipulation

It is difficult to install a high-precision ranging instrument on a compact instrument such as a white light interference atomic force scanning probe microscope; and it takes a lot of time to manually control it. At the same time, it is difficult to control the distance to the workpiece each time, and the randomness bigger

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