A Traceable White Light Interferometric Atomic Force Probe Automatic Positioning Method for Workpieces

Abstract

The invention discloses a method for automatically positioning workpieces with traceable white light interference atomic force probes. The method includes the following steps: recording the initial displacement of the laser interference displacement measurement system before the movement of the nanoscale displacement platform; An appropriate amount of displacement, after the displacement occurs, judge whether the atomic force probe is positioned on the workpiece by whether the movement of the zero-order fringe is within the threshold range, and if the nanoscale vertical displacement platform has not positioned the workpiece when it reaches the limit displacement movement , record its final position, reset the nanoscale vertical displacement platform, and repeat the above steps until the workpiece is positioned. According to the automatic positioning method set in the present invention, it is not limited by the distance between the atomic force probe and the workpiece. At the same time, the displacement is measured during the positioning process, which can realize traceability, and the movement amount of the zero-order fringe is used to judge the probe. Whether the needle is positioned to the workpiece has a significant effect on fast positioning and high precision.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise surface topography measurement. More specifically, it is an automatic positioning method for workpieces based on traceable metrology and white light interference. Background technique [0002] The white light interference atomic force scanning probe microscope uses the zero-order fringes of white light to quantify the deformation of the atomic force scanning probe, thereby indirectly obtaining the height of the workpiece surface. The deformation principle of the atomic force scanning probe is the van der Waals force between atoms. During measurement, the tip of the atomic force scanning probe is equivalent to an atom, and an atom on the surface of the sample to be measured will interact with the tip of the atomic force scanning probe, causing the cantilever of the atomic force scanning probe to deform. The white light interference fringes formed on the cantilever will move accordingly, and...

AI Technical Summary

Problems solved by technology

The range of force between atoms is usually in the unit order of nm, so to achieve accurate positioning, either use high-precision distance measuring instruments, or only rely on human manipulation

It is difficult to install a high-precision ranging instrument on a compact instrument such as a white light interference atomic force scanning probe microscope; and it takes a lot of time to manually control it. At the same time, it is difficult to control the distance to the workpiece each time, and the randomness bigger

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