Semiconductor device for detection of ion activity of analyte and detection method thereof

Abstract

The invention relates to a semiconductor device for detecting the ionic activity of an object to be detected and a detection method thereof. The semiconductor device comprises a substrate, a source and a drain, the source and the drain are arranged on the substrate, the semiconductor device also comprises a first ion-sensitive membrane and a second ion-sensitive membrane which have different sensitivities to the ionic activity of the object to be detected, moreover, the object to be detected is arranged between the first ion-sensitive membrane and the second ion-sensitive membrane, the first ion-sensitive membrane is arranged on the substrate, the second ion-sensitive membrane is connected with a grid power supply, and in a preferred embodiment, a comb capacitor is also introduced. The semiconductor device for detecting the ionic activity of the object to be detected, which adopts the structure, and the detection method thereof dispense a reference electrode, and introduce the two different ion-sensitive membranes to accurately measure the ionic activity of the object to be detected, the structure is simple, the cost is low, and the semiconductor device has a wide application range.

Description

technical field [0001] The present invention relates to the technical field of semiconductors, in particular to semiconductor devices, in particular to a semiconductor device and a detection method for detecting the ion activity of an analyte. Background technique [0002] The properties of the analyte have a direct impact on the physical and chemical processes that occur in it, especially, for example, in the biological field, the ionic activity and dielectric properties of the electrolyte directly affect the biological process, and for example in the fields of petroleum, lubricating oil, etc. , the degree of cracking has a huge impact on the performance, durability and energy saving of machinery and equipment using the petroleum and lubricating oil. Therefore, there is a need for a simple and accurate device and method for detecting liquid properties. In the prior art, semiconductor devices are usually used to detect the object to be tested, as follows: [0003] First, s...

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Problems solved by technology

[0010] (1) The determination of the ion activity of the semiconductor device of the prior art needs to keep the voltage provided by the reference electrode to the test object constant, but the test method is very complicated to keep the voltage of the reference electrode constant , and the accuracy and repeatability need to be optimized, the scope of application is limited

[0011] (2) In addition, the determination of the ionic activity of the semiconductor device in the prior art is inseparable from the reference electrode, and because the traditional reference electrode has a large volume and high material cost, it is not conducive to large-scale application

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