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Spraying device

A spraying device and a technology for spraying materials, which are applied in the direction of spraying devices, liquid spraying devices, etc., can solve the problems of inconvenient use, increased cost, and weakened pressure of uniform spraying components.

Inactive Publication Date: 2017-10-03
PREMTEK INT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] When the existing spraying device is used up, the storage container needs to be disassembled to refill the spraying material, which not only causes inconvenience in use, but also increases the manufacturing cost due to the termination of the process
In addition, as the number of times the uniform spraying element is used increases, the spraying material sent through the uniform spraying element will remain in the uniform spraying element. In addition to causing waste of spraying materials, it will also weaken the spraying pressure of the uniform spraying element. Causes a reduction in the amount of spray material sprayed out of uniform spray elements, which in turn affects the effectiveness of the spray process

Method used

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Embodiment Construction

[0069] The implementation of the present invention will be described in more detail below with reference to the figures and symbol numbers, so that those skilled in the art can implement it after studying this specification.

[0070] figure 1 To show a schematic diagram of a spraying device according to a preferred embodiment of the present invention, figure 2 It is a partial sectional view showing a spraying device according to a preferred embodiment of the present invention. Such as Figure 1 to Figure 2 As shown, the spraying device provided by the present invention includes: a base 10, a material storage container 20, an automatic quantitative continuous feeding device 21, a stirring mechanism, a uniform spraying element 23, a recovery mechanism and a pressure compensator 50 .

[0071] Such as figure 1 As shown, the storage container 20 has an output end 201 and a fixed end 202 . The fixed end 202 of the storage container 20 is fixed on the base 10 via a connecting s...

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Abstract

The invention provides a spraying device, which includes: a base, a material storage container, an automatic quantitative continuous feeding device, a stirring mechanism, a uniform spraying element and a pressure compensator. The storage container is fixed on the base through a connecting seat. The automatic quantitative continuous feeding device is connected to the material storage container through a feeding pipeline, thereby adding a spraying material contained therein to the material storage container. The stirring mechanism stirs the spraying material in the material storage container. The uniform spraying element is connected with the material storage container through a feeding pipeline, and is used for outputting the spraying material in the material storage container. The pressure compensator is connected to a pressurized channel, which applies a compensating pressure to the spraying material in the storage container to adjust the liquid surface pressure of the spraying material, thereby compensating the spraying amount sprayed by the uniform spraying element.

Description

technical field [0001] The present invention relates to a spraying device, in particular to a spraying device which is used for spraying process in semiconductor manufacturing process and has a pressure compensation mechanism. Background technique [0002] The spraying device is a device often used in the semiconductor manufacturing process, and its main function is to spray a spraying material onto the wafer in the semiconductor to perform the spraying process in the semiconductor manufacturing process. Existing spraying device mainly comprises the material storage container that is used to hold the spraying material, is arranged on the stirring bar in the material storage container, is used to drive the stirring bar to stir the stirring motor of the spraying material in the material storage container, and is used for Spray material is sprayed onto evenly coated components on the wafer. However, the existing spraying device constituted by the above structure has the follow...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05B9/04B05B15/04B05B15/10B05B15/02B05B15/06B05B15/00
Inventor 林武郎周明源郭子玮甘东昇郭明伦方建利郑煌玉
Owner PREMTEK INT