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Illumination test device and test method for illumination uniformity and stray light

A technology of a testing device and a testing method, applied in the field of projection exposure, can solve problems such as insufficient sampling frequency of image plane space, and achieve the effects of realizing high-precision measurement, short test time, and solving insufficient sampling frequency

Active Publication Date: 2018-03-02
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The purpose of the present invention is to provide a lighting test device and a test method for lighting uniformity and stray light, which can solve the problem of insufficient sampling frequency of the image plane space, and can simultaneously realize high-precision measurement of small field of view lighting uniformity and stray light

Method used

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  • Illumination test device and test method for illumination uniformity and stray light

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Embodiment Construction

[0046] The lighting testing device and lighting uniformity and stray light testing method of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is represented, and it should be understood that those skilled in the art can modify the present invention described here , while still realizing the advantageous effects of the present invention. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0047] In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out t...

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Abstract

The invention proposes an illumination test device and a test method for illumination uniformity and stray light, and adds a special detection optical path for energy detection, which solves the problem of insufficient sampling frequency of the image plane space, and can realize uniform illumination of a small field of view at the same time High-precision measurement of stray light and stray light; the test time is shorter than the traditional motion table driving point energy sensor; real-time monitoring of stray light is possible without loading a mask.

Description

technical field [0001] The invention relates to the field of projection exposure, in particular to an illumination test device and a test method for illumination uniformity and stray light. Background technique [0002] For projection exposure systems, the uniformity of the illumination system will directly affect the dose distribution of each point in the field of view, so the in-situ measurement of illumination uniformity is a must-have function for any projection exposure device. In addition, the stray light of the illumination system will also lead to the reduction of the imaging performance and the reduction of the process window, so the monitoring of the performance of the stray light is also one of the necessary functions of the projection exposure device. [0003] The traditional projection exposure system generally uses a point energy sensor integrated on the moving platform, and the moving platform drives the point energy sensor to collect the energy of each point ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 江传亮许琦欣王天寅
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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