Laterally distributed three-sensitive gate metal strain gauge capable of measuring off-chip lateral deflection

Abstract

The invention relates to a metal foil gauge of three transversely distributed sensitive grids capable of measuring the outer transverse deviation. A substrate and the three sensitive grids fixed on the substrate are included, each sensitive grid comprises a sensitive segment and transitional segments, and the axes of all the sensitive segments are lines in parallel in the same plane; in the plane, the direction of the axes is the axial direction, and the direction vertical to the axial direction is the transverse direction; the centers of the three sensitive grids have no deviation in the axial direction and have deviation in the transverse direction; the upper sensitive grid, the middle sensitive grid and the lower sensitive grid are successively arranged from top to bottom in the transverse direction according to the center positions of the sensitive grids; and the total resistance change values of the upper sensitive grid, the middle sensitive grid and the lower sensitive grid in the same strain are in the proportion of 5:12:7. The metal foil gauge can be used to measure the transverse first-order deviation of one position of the central lower outer side of the lower sensitive grid, and the distance from the position to the center of the lower sensitive grid equals that from the center of the lower sensitive grid to the center of the upper sensitive grid.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a metal strain gauge. Background technique [0002] The working principle of the metal resistance strain gauge is the resistance strain effect, that is, when the metal wire is subjected to strain, its resistance changes correspondingly with the magnitude of the mechanical deformation (stretch or compression). The theoretical formula for the resistance strain effect is as follows: [0003] [0004] Where R is its resistance value, ρ is the resistivity of the metal material, L is the length of the metal material, and S is the cross-sectional area of ​​the metal material. During the process of mechanical deformation of the metal wire under strain, ρ, L, and S will all change, which will inevitably cause changes in the resistance value of the metal material. When the metal material is stretched, the length increases, the cross-sectional area decreases, and the resistance value increases; ...

AI Technical Summary

Problems solved by technology

[0013] In order to overcome the deficiency that the existing metal strain gauges cannot detect the strain deflection, the present invention provides a three-sensitive grid metal strain that can measure the transverse deflection of the lateral deflection outside the sheet, which can not only measure the strain but also effectively detect the lateral deflection of the surface strain. especially when measuring workpiece corners, edges, etc., where the size of the strain gauge is limited or other axial first-order deflectors that are not suitable for the location of the strain gauge

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